Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Product Type

Large Format Filters

Marksman™, Large Format Filters, Filter Grade 40 µm, polypropylene, Size 1 bag

Product ID: PFTM401UEPFA
Unit of Measure
4/EA
Min Order Qty
4

Marksman™, Large Format Filters, Filter Grade 3 µm, polypropylene, Size 2 bag, No flange, Polypropylene Hardware

Product ID: PFTM32UNF
Unit of Measure
4/EA
Min Order Qty
4

Marksman™ High Flow, Large Format Filters, Filter Grade 40 µm, polypropylene, Length 20 Inches, Ethylene Propylene U-cup

Product ID: PFTM4020UHFJU
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
20/508 inches/mm
Filter Grade
40 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6.3 in
Outside Diameter (Metric)
160 mm
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Marksman™, Large Format Filters, Filter Grade 40 µm, polypropylene, Size 2 bag, Nitrile, Plastic self-adjusting flange

Product ID: PFTM402UNPFB
Unit of Measure
4/EA
Min Order Qty
4

Marksman™ High Flow, Large Format Filters, Filter Grade 40 µm, polypropylene, Length 20 Inches

Product ID: PFTM4020UHFJ
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
20/508 inches/mm
Filter Grade
40 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6.3 in
Outside Diameter (Metric)
160 mm
See All Attributes

Marksman™, Large Format Filters, Filter Grade 40 µm, polypropylene, Size 1 bag, Nitrile

Product ID: PFTM401UNPFA
Unit of Measure
4/EA
Min Order Qty
4

Marksman™ High Flow, Large Format Filters, Filter Grade 3 µm, polypropylene, Length 60 Inches, Ethylene Propylene O-ring

Product ID: PFTM360UHFJ
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
60/1524 inches/mm
Filter Grade
3 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6.3 in
Outside Diameter (Metric)
160 mm
See All Attributes

Marksman™ High Flow, Large Format Filters, Filter Grade 40 µm, polypropylene, Length 40 Inches, Ethylene Propylene U-cup

Product ID: PFTM4040UHFJU
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
40/1016 inches/mm
Filter Grade
40 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6.3 in
Outside Diameter (Metric)
160 mm
See All Attributes

Marksman™, Large Format Filters, Filter Grade 40 µm, polypropylene, Size 2 bag, EPDM, Plastic self-adjusting flange

Product ID: PFTM402UEPFA
Unit of Measure
4/EA
Min Order Qty
4
Filter Grade
40 µm

Marksman™ High Flow, Large Format Filters, Filter Grade 40 µm, polypropylene, Length 40 Inches, Ethylene Propylene O-ring

Product ID: PFTM4040UHFJ
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
40/1016 inches/mm
Filter Grade
40 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6.3 in
Outside Diameter (Metric)
160 mm
See All Attributes

Marksman™ High Flow, Large Format Filters, Filter Grade 40 µm, polypropylene, Length 40 Inches, Nitrile O-ring

Product ID: PFTM4040UHFH13
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
40/1016 inches/mm
Filter Grade
40 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6.3 in
Outside Diameter (Metric)
160 mm
See All Attributes
657 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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