Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

Order Products

Product Use

Pre-Filtration

Filter Media

Polypropylene

Nexis® A Series Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 10 inches, DOE industrial (no end caps) product photo

Nexis® A Series Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 10 inches, DOE industrial (no end caps)

Product ID: NXA2010U
Unit of Measure
30/EA
Min Order Qty
30
Micron
20 micron
Nexis® A Series Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 40 inches, DOE industrial (no end caps) product photo

Nexis® A Series Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 40 inches, DOE industrial (no end caps)

Product ID: NXA2040U
Unit of Measure
12/EA
Min Order Qty
12
Micron
20 micron
Nexis® A Series Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 30 inches, FEP encapsulated fluorocarbon elastomer Orings product photo

Nexis® A Series Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 30 inches, FEP encapsulated fluorocarbon elastomer Orings

Product ID: NXA2030UM8F
Unit of Measure
12/EA
Min Order Qty
12
Micron
20 micron
NXA 30-30U-DOEE product photo

Nexis, NXA, 30 μm, 76.2 cm (30 in), DOE with elastomer gasket seals and end caps, EPDM gasket

Product ID: NXA3030UDOEE
Unit of Measure
1/EA
Min Order Qty
1
Micron
30 micron
Nexis® A Series Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 20 inches, DOE industrial (no end caps) product photo

Nexis® A Series Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 20 inches, DOE industrial (no end caps)

Product ID: NXA3020U
Unit of Measure
12/EA
Min Order Qty
12
Micron
30 micron
Nexis® A Series Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 30 inches, DOE industrial (no end caps) product photo

Nexis® A Series Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 30 inches, DOE industrial (no end caps)

Product ID: NXA2030U
Unit of Measure
12/EA
Min Order Qty
12
Micron
20 micron
Nexis® A Series Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 30 inches, DOE Santoprene gasket seal product photo

Nexis® A Series Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 30 inches, DOE Santoprene gasket seal

Product ID: NXA3030UH21
Unit of Measure
12/EA
Min Order Qty
12
Micron
30 micron
NXA 3-20U-M3E product photo

Nexis, NXA, 3 μm, 50.8 cm (20 in), SOE flat closed end, external 222 O-rings (retrofits other manufacturers’ Code 0), EPDM gasket

Product ID: NXA320UM3E
Unit of Measure
12/EA
Min Order Qty
12
Micron
3 micron
Nexis® A Series Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 20 inches, silicone, DOE with elastomer gasket seals and end caps product photo

Nexis® A Series Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 20 inches, silicone, DOE with elastomer gasket seals and end caps

Product ID: NXA320UDOES
Unit of Measure
12/EA
Min Order Qty
12
Micron
3 micron
Nexis® A Series Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 29.25 inches, DOE Santoprene gasket seal product photo

Nexis® A Series Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 29.25 inches, DOE Santoprene gasket seal

Product ID: NXA32925UH21
Unit of Measure
12/EA
Min Order Qty
12
Micron
3 micron
Nexis® A Series Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 20 inches, silicone, SOE fin end external 226 O-rings product photo

Nexis® A Series Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 20 inches, silicone, SOE fin end external 226 O-rings

Product ID: NXA320UM7S
Unit of Measure
12/EA
Min Order Qty
12
Micron
3 micron
Nexis® A Series Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 30 inches, EPDM product photo

Nexis® A Series Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 30 inches, EPDM

Product ID: NXA3030UM3E
Unit of Measure
24/EA
Min Order Qty
24
Micron
30 micron
830 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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