Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Beta Rating

BETA 2000

Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 3 μm, GlassFiber, Length 18 Inches

Product ID: HC2296FRZ18H50
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
HC2296
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
3 micron (Beta 2000)
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Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 5 μm, GlassFiber, Length 16 inches

Product ID: HC9601FHP16J
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
HC9601
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
5 micron (Beta 2000)
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Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 25 μm, GlassFiber, Length 4 inches

Product ID: HC9021FHT4HSGM
Unit of Measure
12/EA
Min Order Qty
12
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
HC9021
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
25 micron (Beta 2000)
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ELEMENT UE210AS20Z

Product ID: UE210AS20Z
Unit of Measure
6/EA
Min Order Qty
6
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
UE210
Family
Athalon
Filter Media
Glass Fiber
Filter Removal Rating
12 micron (Beta 2000)
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Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 5 μm, GlassFiber, Length 13 Inches

Product ID: HC6300FRP13Z
Unit of Measure
3/EA
Min Order Qty
3
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
HC6300
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
5 micron (Beta 2000)
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Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 5 μm, GlassFiber, Length 13 inches

Product ID: HC9601FHP13ZYGE
Unit of Measure
3/EA
Min Order Qty
3
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
HC9601
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
5 micron (Beta 2000)
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Athalon Glass Fiber 25 micron (Beta 2000) Ethylene Propylene 3in 7.62cm

Product ID: UE209AT03J
Unit of Measure
16/EA
Min Order Qty
16
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
UE209
Family
Athalon
Filter Media
Glass Fiber
Filter Removal Rating (μm)
25 µm
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ELEMENT UE210AN08Z

Product ID: UE210AN08Z
Unit of Measure
6/EA
Min Order Qty
6
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
UE210
Family
Athalon
Filter Media
Glass Fiber
Filter Removal Rating
7 micron (Beta 2000)
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Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 25 μm, GlassFiber, Length 8 inches

Product ID: HCT200FRT08Z
Unit of Measure
6/EA
Min Order Qty
6
Beta Rating
BETA 2000
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
25 micron (Beta 2000)
Filter Removal Rating (μm)
25 µm
Nominal Length (Imperial)
8 in
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Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 5 μm, GlassFiber, Length 3 Inches

Product ID: HC2207FHP3Z
Unit of Measure
12/EA
Min Order Qty
12
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
HC2207
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
5 micron (Beta 2000)
See All Attributes

Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 12 μm, GlassFiber, Length 16 Inches

Product ID: HC6900FRS16Z
Unit of Measure
6/EA
Min Order Qty
6
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
HC6900
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
12 micron (Beta 2000)
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ELEMENT UE310AN08Z

Product ID: UE310AN08Z
Unit of Measure
6/EA
Min Order Qty
6
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
UE310
Family
Athalon
Filter Media
Glass Fiber
Filter Removal Rating (μm)
7 µm
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Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)

Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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