Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Applications

Preclarification

FBT Sanitary housing for eight cartridge filters - 762 mm (30”)

Product ID: FBT083G47H43A
Unit of Measure
1/EA
Min Order Qty
1
Bowl Clearance
810 mm
Cartridge Lock
Bayonet-Lock
Cartridge Style
AB Code 7
Design Pressure (barg)
-1/10 Barg @ -10/150 T°C
Food Contact Compliant
Yes
Housing Height (Metric)
1428 mm
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SUPRAdisc SD II 200 200X200C440SPW

Product ID: 7007925
Unit of Measure
1/EA
Min Order Qty
1
Adaptor End Configuration
Double Open End, Flat Gasket
1. Recommended Max. Backpressure During Backwash
0.5 bar
Plastic Material
Polypropylene
2. Recommended Max. Backpressure During Backwash
7.25 psid
Adaptor Type
Double Open End, Flat Gasket
Core Drainage Discs
Polypropylene
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SUPRAdisc SD II 300 200X300C440SPW

Product ID: 7007932
Unit of Measure
1/EA
Min Order Qty
1
Adaptor End Configuration
Double Open End, Flat Gasket
1. Recommended Max. Backpressure During Backwash
0.5 bar
Plastic Material
Polypropylene
2. Recommended Max. Backpressure During Backwash
7.25 psid
Adaptor Type
Double Open End, Flat Gasket
Core Drainage Discs
Polypropylene
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SUPRAdisc SD II 900 200X900C440SPW

Product ID: 7007942
Unit of Measure
1/EA
Min Order Qty
1
Adaptor End Configuration
Double Open End, Flat Gasket
1. Recommended Max. Backpressure During Backwash
0.5 bar
Plastic Material
Polypropylene
2. Recommended Max. Backpressure During Backwash
7.25 psid
Adaptor Type
Double Open End, Flat Gasket
Core Drainage Discs
Polypropylene
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SUPRAdisc SD II 700 200X700C440SPW

Product ID: 7007899
Unit of Measure
1/EA
Min Order Qty
1
Adaptor End Configuration
Double Open End, Flat Gasket
1. Recommended Max. Backpressure During Backwash
0.5 bar
Plastic Material
Polypropylene
2. Recommended Max. Backpressure During Backwash
7.25 psid
Adaptor Type
Double Open End, Flat Gasket
Core Drainage Discs
Polypropylene
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Backflush Support Set-for SUPRAdisc II 16" modules, to be used in WSFZ 16" 4 high housings

Product ID: 20041342
Unit of Measure
1/EA
Min Order Qty
1
Diameter (Imperial)
16 in
Diameter (Metric)
410 mm
Food Contact Compliant
Yes
Hot Water Sanitization
85 °C
Steam Sterilization
121 °C
Support Grid
Polypropylene
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SUPRAdisc SD II EK 200XEK0C440SPW

Product ID: 7007879
Unit of Measure
1/EA
Min Order Qty
1
Adaptor End Configuration
Double Open End, Flat Gasket
1. Recommended Max. Backpressure During Backwash
0.5 bar
Plastic Material
Polypropylene
2. Recommended Max. Backpressure During Backwash
7.25 psid
Adaptor Type
Double Open End, Flat Gasket
Core Drainage Discs
Polypropylene
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SUPRAdisc SD II 50 200X050C440SPW

Product ID: 7007897
Unit of Measure
1/EA
Min Order Qty
1
Adaptor End Configuration
Double Open End, Flat Gasket
1. Recommended Max. Backpressure During Backwash
0.5 bar
Plastic Material
Polypropylene
2. Recommended Max. Backpressure During Backwash
7.25 psid
Adaptor Type
Double Open End, Flat Gasket
Core Drainage Discs
Polypropylene
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SUPRAdisc SD II 100 200X100C440SPW

Product ID: 7007891
Unit of Measure
1/EA
Min Order Qty
1
Adaptor End Configuration
Double Open End, Flat Gasket
1. Recommended Max. Backpressure During Backwash
0.5 bar
Plastic Material
Polypropylene
2. Recommended Max. Backpressure During Backwash
7.25 psid
Adaptor Type
Double Open End, Flat Gasket
Core Drainage Discs
Polypropylene
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SUPRAdisc SD II 80 200X080C440SPW

Product ID: 7007883
Unit of Measure
1/EA
Min Order Qty
1
Adaptor End Configuration
Double Open End, Flat Gasket
1. Recommended Max. Backpressure During Backwash
0.5 bar
Plastic Material
Polypropylene
2. Recommended Max. Backpressure During Backwash
7.25 psid
Adaptor Type
Double Open End, Flat Gasket
Core Drainage Discs
Polypropylene
See All Attributes

SUPRAdisc SD II EK 1 200XEK1C440SPW

Product ID: 7007931
Unit of Measure
1/EA
Min Order Qty
1
Adaptor End Configuration
Double Open End, Flat Gasket
1. Recommended Max. Backpressure During Backwash
0.5 bar
Plastic Material
Polypropylene
2. Recommended Max. Backpressure During Backwash
7.25 psid
Adaptor Type
Double Open End, Flat Gasket
Core Drainage Discs
Polypropylene
See All Attributes

SUPRAdisc SD II 150 200X150C440SPW

Product ID: 7007900
Unit of Measure
1/EA
Min Order Qty
1
Adaptor End Configuration
Double Open End, Flat Gasket
1. Recommended Max. Backpressure During Backwash
0.5 bar
Plastic Material
Polypropylene
2. Recommended Max. Backpressure During Backwash
7.25 psid
Adaptor Type
Double Open End, Flat Gasket
Core Drainage Discs
Polypropylene
See All Attributes
16 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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