Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Brand

Claris®

AVS1M30

Product ID: AVS1M30
Unit of Measure
24/EA
Min Order Qty
24

AVS50M9.75

Product ID: AVS50M975
Unit of Measure
72/EA
Min Order Qty
72

AVS5M30

Product ID: AVS5M30
Unit of Measure
24/EA
Min Order Qty
24

AVS20M30

Product ID: AVS20M30
Unit of Measure
24/EA
Min Order Qty
24

AVS5M9.75

Product ID: AVS5M975
Unit of Measure
72/EA
Min Order Qty
72

CLR 10-19.8 40

Product ID: CLR1019840
Unit of Measure
24/EA
Min Order Qty
24

Claris® Filter Cartridges, Polypropylene, Length 20 inches

Product ID: CLR0520843
Unit of Measure
24/EA
Min Order Qty
24
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Change Out Differential Pressure
2.4 bard
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
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Claris® Filter Cartridge, CLR1010W480

Product ID: CLR1010W480
Unit of Measure
36/EA
Min Order Qty
36
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket O-Ring Code
Blank
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Claris® Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 20 inches, silicone, SOE fin end external 222 O-rings

Product ID: CLR1020M8S
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Silicone
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10µm, 20", DOE (no seal) F&B

Product ID: CLR1020W480
Unit of Measure
24/EA
Min Order Qty
24
Claris® Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 19.5 inches product photo

Claris® Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 19.5 inches

Product ID: CLR10195
Unit of Measure
24/EA
Min Order Qty
24
Length
49.5 cm / 19.5 in
Micron
10 micron

Claris® Filter Cartridges, Removal Rating 10 μm, Polypropylene

Product ID: CLR10305
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
10 µm
Membrane Material
Polypropylene
Gasket / O-Ring Material
NA
End Configuration Code
Blank
End Configuration
Blank - DOE industrial (no end caps)
Change Out Differential Pressure
2.4 bard
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175 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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