Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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DFT Classic®

DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 30 Inches, Polypropylene, FluorocarbonElastomer product photo

DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 30 Inches, Polypropylene, FluorocarbonElastomer

Product ID: C001AW30UVM3
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
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DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 30 Inches, 304 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 30 Inches, 304 stainless steel

Product ID: C001AW30A
Unit of Measure
1/EA
Min Order Qty
1
C003AW40A-1PK product photo

C003AW40A-1PK

Product ID: C003AW40A1PK
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Individually wrapped
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DFT Classic®, Filter Cartridges, Removal Rating 30 μm, Length 10 Inches, 304 stainless steel

Product ID: C030A10A
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
30 µm
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
Cartridge Outer Diameter (OD) (Metric)
6.4 cm
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DFT Classic®, Filter Cartridges, Removal Rating 75 μm, Length 29.5 Inches, 316 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 75 μm, Length 29.5 Inches, 316 stainless steel

Product ID: C075AW295S
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
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E100AW30S product photo

E100AW30S

Product ID: E100AW30S
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
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DFT Classic®, Filter Cartridges, Removal Rating 1 μm, GlassFiber, Length 40 Inches, 316 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 1 μm, GlassFiber, Length 40 Inches, 316 stainless steel

Product ID: F001AW40SCE1PK
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Individually wrapped
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DFT Classic®, Filter Cartridges, Removal Rating 5 μm, GlassFiber, Length 30 Inches product photo

DFT Classic®, Filter Cartridges, Removal Rating 5 μm, GlassFiber, Length 30 Inches

Product ID: F005AW30A1PK
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Individually wrapped
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G G001AW20A-1PK product photo

G G001AW20A-1PK

Product ID: GG001AW20A1PK
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Individually wrapped
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DFT Classic®, Filter Cartridges, Removal Rating 0.5 μm, Length 40 Inches, 304 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 0.5 μm, Length 40 Inches, 304 stainless steel

Product ID: GG05AW40A1PK
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Individually wrapped
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G G005AW20A-1PK product photo

GG005AW20A1PK

Product ID: GG005AW20A1PK
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Individually wrapped
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DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 40 Inches, 316 stainless steel, with Extended Core, Individually wrapped product photo

DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 40 Inches, 316 stainless steel, with Extended Core, Individually wrapped

Product ID: G001AW40SEC1S1PK
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Individually wrapped
See All Attributes
421 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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