Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

Order Products

Brand

DFT Classic®

DFT Classic®, Filter Cartridges, Removal Rating 25 μm, Polypropylene, Length 40 Inches product photo

DFT Classic®, Filter Cartridges, Removal Rating 25 μm, Polypropylene, Length 40 Inches

Product ID: P025AW40A
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Bulk
See All Attributes
P150A10U product photo

P150A10U

Product ID: P150A10U
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Bulk
See All Attributes
PERMI-L 70-U-A-S product photo

PERMI-L 70-U-A-S

Product ID: PERMIL70UAS
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Bulk
See All Attributes
PERMI-L 57-U-A-R 624 product photo

PERMI-L 57-U-A-R 624

Product ID: PERMIL57UAR624
Unit of Measure
272/EA
Min Order Qty
272
Packaging
Bulk
See All Attributes
PERMI-L 70-RT-A-S 569 product photo

PERMI-L 70-RT-A-S 569

Product ID: PERMIL70RTAS569
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Bulk
See All Attributes
PERMI-L 7.68-U-VENT-P product photo

PERMI-L 7.68-U-VENT-P

Product ID: PERMIL768UVENTP
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Bulk
See All Attributes
PERMI-L 57-U-A-SM product photo

PERMI-L 57-U-A-SM

Product ID: PERMIL57UASM
Unit of Measure
272/EA
Min Order Qty
272
Packaging
Bulk
See All Attributes
PERMI-L SM VENT FILTER product photo

PERMI-L SM VENT FILTER

Product ID: PERMILSMVENTFILTER
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Bulk
See All Attributes
DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 10 Inches, 304 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 10 Inches, 304 stainless steel

Product ID: C001A10A
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Bulk
See All Attributes
DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 10 Inches, 316 stainless steel, with Core Cover product photo

DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 10 Inches, 316 stainless steel, with Core Cover

Product ID: C001A10SC
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Bulk
See All Attributes

DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 20 Inches, 304 stainless steel, with Core Cover

Product ID: C001AW20AC
Unit of Measure
10/EA
Min Order Qty
10
Removal Rating
1 µm
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
Cartridge Outer Diameter (OD) (Metric)
6.4 cm
See All Attributes

Discontinued

This part is no longer available. Please contact us for more information.
DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 19.5 Inches, 304 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 19.5 Inches, 304 stainless steel

Product ID: C001AW195A
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Bulk
See All Attributes
420 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

    Select Language :
    English