Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Brand

DFT Classic®

Industries

Oil & Gas

DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 20 Inches, Electrolytic tin plated steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 20 Inches, Electrolytic tin plated steel

Product ID: C001AW20T
Unit of Measure
10/EA
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10
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DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 30 Inches, Polypropylene, FluorocarbonElastomer product photo

DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 30 Inches, Polypropylene, FluorocarbonElastomer

Product ID: C001AW30UVM3
Unit of Measure
10/EA
Min Order Qty
10
Packaging
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DFT Classic®, Filter Cartridges, Removal Rating 3 μm, Length 20 Inches, 304 stainless steel, Bulk packaging product photo

DFT Classic®, Filter Cartridges, Removal Rating 3 μm, Length 20 Inches, 304 stainless steel, Bulk packaging

Product ID: C003AW20A
Unit of Measure
10/EA
Min Order Qty
10
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DFT Classic®, Filter Cartridges, Removal Rating 3 μm, Length 40 Inches, 316 stainless steel, Bulk packaging product photo

DFT Classic®, Filter Cartridges, Removal Rating 3 μm, Length 40 Inches, 316 stainless steel, Bulk packaging

Product ID: C003AW40S
Unit of Measure
10/EA
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10
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DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 10 Inches, 316 stainless steel, Individually wrapped product photo

DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 10 Inches, 316 stainless steel, Individually wrapped

Product ID: C005A10S1PK
Unit of Measure
30/EA
Min Order Qty
30
Packaging
Individually wrapped
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DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 30 Inches, 304 stainless steel, with Core Cover, Individually wrapped product photo

DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 30 Inches, 304 stainless steel, with Core Cover, Individually wrapped

Product ID: C005AW30AC1PK
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Individually wrapped
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DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Bleached cotton, Length 30 Inches, 316 stainless steel, Bulk packaging product photo
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
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DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 30 Inches, 316 stainless steel,  Individually wrapped product photo

DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 30 Inches, 316 stainless steel, Individually wrapped

Product ID: C005AW30S1PK
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Individually wrapped
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DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Bleached cotton, Length 10 Inches, 304 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Bleached cotton, Length 10 Inches, 304 stainless steel

Product ID: C010A10A
Unit of Measure
30/EA
Min Order Qty
30
Packaging
Bulk
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DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 29.5 Inches, 304 stainless steel, Bulk packaging product photo

DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 29.5 Inches, 304 stainless steel, Bulk packaging

Product ID: C010AW295A
Unit of Measure
10/EA
Min Order Qty
10
Packaging
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DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 20 Inches, 304 stainless steel, Bulk packaging product photo

DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 20 Inches, 304 stainless steel, Bulk packaging

Product ID: C010AW20A
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
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DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 30 Inches, 316 stainless steel, with Extended Core product photo

DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 30 Inches, 316 stainless steel, with Extended Core

Product ID: C010AW30SEC1S
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
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Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)

Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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