Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Brand

Duo-Fine®

Availability

In Stock

Duo-Fine® , Filter Cartridges, Removal Rating 0.2 μm, Length 10 Inches, Nitrile, DOE with elastomer gasket seals & end caps

Product ID: DFN0210UN
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
0.2 µm
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Nitrile
End Configuration
Blank - DOE with elastomer gasket seals & end caps
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Duo-Fine® , Filter Cartridges, Removal Rating 0.2 μm, Length 10 Inches

Product ID: DFN0210UE
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
0.2 µm
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
End Configuration
Blank - DOE with elastomer gasket seals & end caps
Change Out Differential Pressure
2.4 bard
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Duo-Fine® , Filter Cartridges, Removal Rating 0.2 μm, Length 40 Inches

Product ID: DFN0240UEM26
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
0.2 µm
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Change Out Differential Pressure
2.4 bard
Cartridge Outer Diameter (OD) (Imperial)
2.6 in
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Duo-Fine® , Filter Cartridges, Removal Rating 0.45 μm, Length 10 Inches, Fluorocarbon Elastomer, Blank - DOE with elastomer gasket seals & end caps

Product ID: DFN04510AV
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
0.45 µm
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
End Configuration
Blank - DOE with elastomer gasket seals & end caps
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Duo-Fine® , Filter Cartridges, Removal Rating 0.45 μm

Product ID: DFN0451401
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
0.45 µm
Change Out Differential Pressure
2.4 bard
Cartridge Outer Diameter (OD) (Imperial)
2.6 in
Cartridge Outer Diameter (OD) (Metric)
6.6 cm
Packaging Type
Standard packaging

Duo-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Length 40 Inches, silicone, SOE flat closed end external 222 O-rings

Product ID: DFN04540USM3
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
0.45 µm
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
Silicone
End Configuration Code
M3
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Duo-Fine® , Filter Cartridges, Removal Rating 10 μm, Length 10 Inches, silicone, SOE flat closed end external 222 O-rings

Product ID: DFN1010USM3
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
10 µm
End Configuration
SOE flat closed end, external 222 O-rings
Change Out Differential Pressure
2.4 bard

Duo-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Length 20 Inches, silicone, SOE flat closed end external 222 O-rings

Product ID: DFN04520USM3
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
0.45 µm
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Silicone
End Configuration Code
M3
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Duo-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Length 4 Inches, Nitrile, Blank - DOE with elastomer gasket seals & end caps

Product ID: DFN0454AN317
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
0.45 µm
Cartridge Length (Imperial)
4 in
Cartridge Length (Metric)
102 mm
Cartridge Length (Metric)
10.2 cm
Gasket / O-Ring Material
Nitrile
End Configuration
Blank - DOE with elastomer gasket seals & end caps
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This product is currently not available. Please contact us for more information.

Duo-Fine®, Filter Cartridges, Removal Rating 0.45 μm, Length 29.5 Inches, Nitrile, DOE 2.54 cm (1 in) extended core

Product ID: DFN045295UN1X
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
0.45 µm
Cartridge Length (Imperial)
29.5 in
Cartridge Length (Metric)
749 mm
Cartridge Length (Metric)
74.9 cm
Gasket / O-Ring Material
Nitrile
End Configuration Code
1X
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Duo-Fine® II, Filter Cartridges, Removal Rating 10 μm

Product ID: DFN101401V
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
10 µm
Change Out Differential Pressure
2.4 bard

Duo-Fine® , Filter Cartridges, Removal Rating 10 μm

Product ID: DFN101202R
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
10 µm
Change Out Differential Pressure
2.4 bard
97 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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