Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Brand

Nexis®

NXA 0.5-10U-M3E product photo

Nexis, NXA, 0.5 μm, 25.4 cm (10 in), SOE flat closed end, external 222 O-rings (retrofits other manufacturers’ Code 0), EPDM gasket

Product ID: NXA0510UM3E
Unit of Measure
60/EA
Min Order Qty
60
Micron
0.5 micron

Nexis® A Series Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 10 inches, FEP encapsulated fluorocarbon elastomer Orings

Product ID: NXA0510UM3F
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
0.5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
FEP encapsulated fluorocarbon elastomer (O-rings)
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NXA 0.5-10U-DOEE product photo

Nexis, NXA, 0.5 μm, 25.4 cm (10 in), DOE with elastomer gasket seals and end caps, EPDM gasket

Product ID: NXA0510UDOEE
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.5 micron
Nexis® A Series Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 10 inches product photo

Nexis® A Series Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 10 inches

Product ID: NXA0510U
Unit of Measure
30/EA
Min Order Qty
30
Micron
0.5 micron
NXA 0.5-10U-M7S product photo

Nexis, NXA, 0.5 μm, 25.4 cm (10 in), SOE fin end, external 226 O-rings (retrofits other manufacturers’ Code 7), Silicone gasket

Product ID: NXA0510UM7S
Unit of Measure
30/EA
Min Order Qty
30
Micron
0.5 micron
Nexis® A Series Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 10 inches, Nitrile product photo

Nexis® A Series Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 10 inches, Nitrile

Product ID: NXA0510UM3N
Unit of Measure
30/EA
Min Order Qty
30
Micron
0.5 micron
Nexis® A Series Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 10 inches, EPDM product photo

Nexis® A Series Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 10 inches, EPDM

Product ID: NXA0510UM7E
Unit of Measure
30/EA
Min Order Qty
30
Micron
0.5 micron
NXA 0.5-20U-DOEE product photo

Nexis, NXA, 0.5 μm, 50.8 cm (20 in), DOE with elastomer gasket seals and end caps, EPDM gasket

Product ID: NXA0520UDOEE
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.5 micron

Nexis® A Series Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 20 inches, DOE industrial (no end caps)

Product ID: NXA0520U
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
0.5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
NA
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Nexis® A Series Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 10 inches, silicone product photo

Nexis® A Series Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 10 inches, silicone

Product ID: NXA0510UM3S
Unit of Measure
30/EA
Min Order Qty
30
Micron
0.5 micron

Nexis® A Series Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 19.5 inches

Product ID: NXA05195UH21
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
0.5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
19.5 in
Cartridge Length (Metric)
495 mm
Cartridge Length (Metric)
49.5 cm
Gasket / O-Ring Material
NA
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Nexis® A Series Filter Cartridges, Removal Rating 0.5 μm, Polypropylene

Product ID: NXA051UH21
Unit of Measure
6/EA
Min Order Qty
6
Removal Rating
0.5 µm
Membrane Material
Polypropylene
Gasket / O-Ring Material
NA
End Configuration Code
H21
End Configuration
H21 - DOE, Santoprene gasket seal
Cartridge Type
NXA
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832 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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