Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Brand

Nexis®

Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 5 inches

Product ID: NXT55U
Unit of Measure
60/EA
Min Order Qty
60
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
5 in
Cartridge Length (Metric)
127 mm
Cartridge Length (Metric)
12.7 cm
Gasket / O-Ring Material
NA
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Nexis® T Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 40 inches, silicone, SOE fin end external 226 O-rings product photo

Nexis® T Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 40 inches, silicone, SOE fin end external 226 O-rings

Product ID: NXT140UM7S
Unit of Measure
1/EA
Min Order Qty
1
Micron
1 micron

Nexis® A Series Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 19.5 inches

Product ID: NXA05195UH21
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
0.5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
19.5 in
Cartridge Length (Metric)
495 mm
Cartridge Length (Metric)
49.5 cm
Gasket / O-Ring Material
NA
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Nexis® T Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 30 inches, DOE industrial (no end caps)

Product ID: NXT130U769
Unit of Measure
20/EA
Min Order Qty
20
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
NA
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MPNT 100-14.5N

Product ID: MPNT100145N
Unit of Measure
12/EA
Min Order Qty
12

Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 10 inches, Nitrile, SOE flat closed end external 222 O-rings

Product ID: NXT510UM3N
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Nitrile
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Nexis® A Series Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 40 inches, silicone, SOE flat closed end external 222 O-rings

Product ID: NXA540UM3S
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
Silicone
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NXA 1-30U-DOEE product photo

Nexis, NXA, 1 μm, 76.2 cm (30 in), DOE with elastomer gasket seals and end caps, EPDM gasket

Product ID: NXA130UDOEE
Unit of Measure
1/EA
Min Order Qty
1
Micron
1 micron

Nexis® T Filter Cartridges, Removal Rating 100 μm, Polypropylene

Product ID: NXT100295U
Unit of Measure
10/EA
Min Order Qty
10
Removal Rating
100 µm
Membrane Material
Polypropylene
Gasket / O-Ring Material
NA
End Configuration Code
BLANK
End Configuration
BLANK - DOE industrial (no end caps)
Cartridge Type
NXT
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Nexis® T Filter Cartridges, Removal Rating 200 μm, Polypropylene, Length 10 inches, Fluorocarbon Elastomer, SOE flat closed end external 222 O-rings

Product ID: NXT20010UM3V
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
200 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
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NXT 20-9.875U-H21

Product ID: NXT209875UH21
Unit of Measure
1/EA
Min Order Qty
1

Nexis® T Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 40 inches, Fluorocarbon Elastomer, SOE flat closed end external 222 O-rings

Product ID: NXT140UM3V
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
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719 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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