Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Brand

Poly-Fine®

Poly-Fine® II, Filter Cartridges, Removal Rating 0.2 μm, Highly Asymetric Polysulfone, Length 20 Inches, Expanded PTFE gaskets FEP encapsulated silicone Orings, SOE fin end external 222 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.2 μm, Highly Asymetric Polysulfone, Length 20 Inches, Expanded PTFE gaskets FEP encapsulated silicone Orings, SOE fin end external 222 O-rings

Product ID: PFTQ0220UTM812
Unit of Measure
12/EA
Min Order Qty
12
Micron
0.2 µm

Discontinued

This part is no longer available. Please contact us for more information.
Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 10 Inches, FEP encapsulated Fluorocarbon Elastomer Orings, SOE fin end external 226 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 10 Inches, FEP encapsulated Fluorocarbon Elastomer Orings, SOE fin end external 226 O-rings

Product ID: PFTQ0810UFM712
Unit of Measure
12/EA
Min Order Qty
12
Micron
0.8 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 10 Inches, Expanded PTFE gaskets FEP encapsulated silicone Orings, SOE fin end external 226 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 10 Inches, Expanded PTFE gaskets FEP encapsulated silicone Orings, SOE fin end external 226 O-rings

Product ID: PFTQ0810UTM712
Unit of Measure
12/EA
Min Order Qty
12
Micron
0.8 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 10 Inches, EPDM, SOE fin end external 226 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 10 Inches, EPDM, SOE fin end external 226 O-rings

Product ID: PFTQ1010UEM712
Unit of Measure
12/EA
Min Order Qty
12
Micron
10 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 2 μm, Polypropylene, Length 20 Inches, Expanded PTFE gaskets FEP encapsulated silicone Orings, SOE fin end external 226 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 2 μm, Polypropylene, Length 20 Inches, Expanded PTFE gaskets FEP encapsulated silicone Orings, SOE fin end external 226 O-rings

Product ID: PFTQ220UTM712
Unit of Measure
12/EA
Min Order Qty
12
Micron
2 µm

Discontinued

This part is no longer available. Please contact us for more information.
Poly-Fine® II, Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 20 Inches, FEP encapsulated Fluorocarbon Elastomer Orings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 20 Inches, FEP encapsulated Fluorocarbon Elastomer Orings

Product ID: PFTQ320UFM312
Unit of Measure
12/EA
Min Order Qty
12
Micron
3 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 2 μm, Polypropylene, Length 30 Inches, EPDM, SOE fin end external 226 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 2 μm, Polypropylene, Length 30 Inches, EPDM, SOE fin end external 226 O-rings

Product ID: PFTQ230UEM712
Unit of Measure
12/EA
Min Order Qty
12
Micron
2 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 20 Inches, EPDM, DOE – with open end caps/gasket product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 20 Inches, EPDM, DOE – with open end caps/gasket

Product ID: PFTQ520UE12
Unit of Measure
12/EA
Min Order Qty
12
Micron
5 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 20 Inches, Silicone Elastomer, SOE fin end external 226 O-rings, No Bubble Test product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 20 Inches, Silicone Elastomer, SOE fin end external 226 O-rings, No Bubble Test

Product ID: PFTQ520USM712
Unit of Measure
12/EA
Min Order Qty
12
Micron
5 µm

Discontinued

This part is no longer available. Please contact us for more information.

Poly-Fine® II, Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 10 Inches, Expanded PTFE gaskets FEP encapsulated silicone Orings, SOE fin end external 226 O-rings

Product ID: PFTQ510UTM712
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
5 µm
Membrane Material
Polypropylene
Industry-Specific Certification
General Use
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
See All Attributes

Poly-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Polypropylene, Length 10 Inches, EPDM, DOE – with open end caps/gasket

Product ID: PFTQ04510UE12
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
0.45 µm
Membrane Material
Polypropylene
Industry-Specific Certification
General Use
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
See All Attributes

PUY1UY020H

Product ID: PUY1UY020H
Unit of Measure
1/EA
Min Order Qty
1
731 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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