Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

Order Products

Brand

Poly-Fine®

Poly-Fine® II, Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 40 Inches, Nitrile product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 40 Inches, Nitrile

Product ID: PFT3040UN
Unit of Measure
1/EA
Min Order Qty
1
Micron
30 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 0.25 μm, Polypropylene, Length 10 Inches, EPDM, DOE industrial product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.25 μm, Polypropylene, Length 10 Inches, EPDM, DOE industrial

Product ID: PFT02510UE
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.25 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 0.25 μm, Polypropylene, Length 9.75 Inches product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.25 μm, Polypropylene, Length 9.75 Inches

Product ID: PFT025975UE
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.25 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 10 Inches, Nitrile, DOE industrial product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 10 Inches, Nitrile, DOE industrial

Product ID: PFT1010UN
Unit of Measure
1/EA
Min Order Qty
1
Micron
10 µm

Poly-Fine® II, Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 10 Inches, silicone

Product ID: PFT2010USM7
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
20 µm
Membrane Material
Polypropylene
Industry-Specific Certification
General Use
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
See All Attributes
Poly-Fine® II, Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 20 Inches, Nitrile product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 20 Inches, Nitrile

Product ID: PFT120UN831
Unit of Measure
1/EA
Min Order Qty
1
Micron
1 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 2 μm, Polypropylene, Length 20 Inches, silicone, DOE industrial product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 2 μm, Polypropylene, Length 20 Inches, silicone, DOE industrial

Product ID: PFT220US
Unit of Measure
1/EA
Min Order Qty
1
Micron
2 µm

Poly-Fine® II Filter Cartridges, Removal Rating 1 μm, Length 30 inches, Fluorocarbon Elastomer

Product ID: QMPT010300UVM3
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
1 µm
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
End Configuration Code
M3
See All Attributes

Poly-Fine® II Filter Cartridges, Removal Rating 5 μm, Length 40 inches, Nitrile

Product ID: QMPT050400UN
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
5 µm
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
Nitrile
End Configuration Code
Blank
See All Attributes

Profile® UP, Filter Cartridges, Removal Rating 10 μm, Length 30 Inches, FluorocarbonElastomer

Product ID: AB3UY1007H
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
See All Attributes
Poly-Fine® II, Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 10 Inches, Nitrile product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 10 Inches, Nitrile

Product ID: PFT3010UN
Unit of Measure
1/EA
Min Order Qty
1
Micron
30 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 0.1 μm, Polypropylene, Length 10 Inches, Fluorocarbon Elastomer product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.1 μm, Polypropylene, Length 10 Inches, Fluorocarbon Elastomer

Product ID: PFT0110UVM3958
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.1 µm
695 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

    Select Language :
    English