Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Brand

Poly-Fine®

Filter Media

Polypropylene

Poly-Fine® XLD Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 10 inches, EPDM

Product ID: XLD310UEM3BLK490
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
3 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
EPDM
See All Attributes
Poly-Fine® II, Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 29.25 Inches product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 29.25 Inches

Product ID: PFT52925UE
Unit of Measure
1/EA
Min Order Qty
1
Micron
5 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Polypropylene, Length 9.75 Inches, EPDM, SOE flat closed end external 222 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Polypropylene, Length 9.75 Inches, EPDM, SOE flat closed end external 222 O-rings

Product ID: PFT045975UEM3
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.45 µm

Discontinued

This part is no longer available. Please contact us for more information.

Poly-Fine® II, Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 10 Inches, Expanded PTFE gaskets FEP encapsulated silicone Orings, SOE fin end external 226 O-rings

Product ID: PFTQ510UTM712
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
5 µm
Membrane Material
Polypropylene
Industry-Specific Certification
General Use
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
See All Attributes
Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 20 Inches, Nitrile, SOE flat closed end external 222 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 20 Inches, Nitrile, SOE flat closed end external 222 O-rings

Product ID: PFT0820UNM3
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.8 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 2 μm, Polypropylene, Length 30 Inches, Nitrile, DOE industrial product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 2 μm, Polypropylene, Length 30 Inches, Nitrile, DOE industrial

Product ID: PFT230UN
Unit of Measure
1/EA
Min Order Qty
1
Micron
2 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Polypropylene, Length 10 Inches, Nitrile, DOE industrial, Bulk packaging product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Polypropylene, Length 10 Inches, Nitrile, DOE industrial, Bulk packaging

Product ID: PFT04510UNBBLK
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.45 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 0.25 μm, Polypropylene, Length 10 Inches, EPDM, DOE industrial product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.25 μm, Polypropylene, Length 10 Inches, EPDM, DOE industrial

Product ID: PFT02510UE
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.25 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 20 Inches, silicone, SOE fin end external 226 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 20 Inches, silicone, SOE fin end external 226 O-rings

Product ID: PFT1020USM7
Unit of Measure
12/EA
Min Order Qty
12
Micron
10 µm

Poly-Fine® XLD Filter Cartridges, Polypropylene, Length 10 inches, EPDM, DOE industrial

Product ID: XLD3010UE
Unit of Measure
1/EA
Min Order Qty
1
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
EPDM
End Configuration Code
Blank
See All Attributes
Poly-Fine® II Filter Cartridge, PFT0820UEW480 product photo

Poly-Fine® II Filter Cartridge, PFT0820UEW480

Product ID: PFT0820UEW480
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.8 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 40 Inches, Nitrile, SOE flat closed end external 222 O-ring product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 40 Inches, Nitrile, SOE flat closed end external 222 O-ring

Product ID: PFT1040UNM18
Unit of Measure
1/EA
Min Order Qty
1
Micron
10 µm
563 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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