Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

Order Products

Brand

Profile®

CTRG PROFILE R4F 100 ECO TEC 12684

Product ID: 12684
Unit of Measure
9/EA
Min Order Qty
9
5EC4888389003 product photo

5EC4888389003 **use 5EC4888389003JTIM

Product ID: 5EC4888389003
Unit of Measure
1/EA
Min Order Qty
1

5EC4888389400J

Product ID: 5EC4888389400J
Unit of Measure
1/EA
Min Order Qty
1

Discontinued

This part is no longer available. Please contact us for more information.

GE LOCOMOTIVE 30

Product ID: 84A220402ABP1
Unit of Measure
1/EA
Min Order Qty
1

AB04P00319J

Product ID: AB04P00319JTIMMD
Unit of Measure
1/EA
Min Order Qty
1

AB04P40018J

Product ID: AB04P40018JTIMMD
Unit of Measure
1/EA
Min Order Qty
1

Profile® Star Filter Cartridge, AB1A0107WH4

Product ID: AB1A0107WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
1 µm
Membrane Material
Polypropylene
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
See All Attributes

Filter 10" Profile Star 1µm

Product ID: AB1A0103J
Unit of Measure
1/EA
Min Order Qty
1

Filter 10" Profile Star 1µm

Product ID: AB1A0107H4
Unit of Measure
6/EA
Min Order Qty
6

Profile® Star Filters, AB1A0157WH4

Product ID: AB1A0157WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
1.5 µm
Membrane Material
Polypropylene
Industry-Specific Certification
W480 Food Contact
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
See All Attributes

AB 10" PROFILE STAR C3 A050 H1

Product ID: AB1A0503H1
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

Profile® Star Filter Cartridge, AB1A0307WH4

Product ID: AB1A0307WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
3 µm
Membrane Material
Polypropylene
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
See All Attributes
561 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

    Select Language :
    English