Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Red1000 Glass Fiber 12 micron (Beta 1000) Nitrile 36in 91.44cm

Product ID: HC2296FKS36H
Unit of Measure
1/EA
Min Order Qty
6
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2296
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating (μm)
12 µm
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Ultipor III Glass Fiber 5 micron (Beta 1000) Nitrile 8in 20.32cm length

Product ID: HC9601FDP8H#28
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC9601
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
5 µm
See All Attributes
RT250A10S product photo

RT250A10S

Product ID: RT250A10S
Unit of Measure
30/EA
Min Order Qty
30
Packaging
Bulk
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Additional membrane holder diam 47+grid product photo

Additional membrane holder diam 47+grid

Product ID: PCC0011H
Unit of Measure
1/EA
Min Order Qty
1
Viton gasket for solvant tank diam.150 product photo

Viton gasket for solvant tank diam.150

Product ID: PCC0016B
Unit of Measure
1/EA
Min Order Qty
1
Dimmer switch type VRT6 BVA4 for lamina product photo

Dimmer switch type VRT6 BVA4 for lamina

Product ID: PCC0014I/REV
Unit of Measure
1/EA
Min Order Qty
1

PCC1001AF

Product ID: PCC1001AF
Unit of Measure
1/EA
Min Order Qty
1

CRTG PCC060AF

Product ID: PCC060AF
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

PCC0023D-1 product photo

Stainless steel grid 630x510mm PCC61

Product ID: PCC0023D-1
Unit of Measure
1/EA
Min Order Qty
1

CARBON STELL, CORE AND END CAPS

Product ID: PCC1200HT
Unit of Measure
1/EA
Min Order Qty
1
Tank ultrasonic level switch product photo

Tank ultrasonic level switch

Product ID: PCC4102A
Unit of Measure
1/EA
Min Order Qty
1

PCC600AF

Product ID: PCC600AF
Unit of Measure
1/EA
Min Order Qty
1

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)

Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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