Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Red1000 Glass Fiber 12 micron (Beta 1000) Nitrile 36in 91.44cm

Product ID: HC2296FKS36H
Unit of Measure
1/EA
Min Order Qty
6
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2296
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating (μm)
12 µm
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Ultipor III Glass Fiber 5 micron (Beta 1000) Nitrile 8in 20.32cm length

Product ID: HC9601FDP8H#28
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC9601
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
5 µm
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RT250A10S product photo

RT250A10S

Product ID: RT250A10S
Unit of Measure
30/EA
Min Order Qty
30
Packaging
Bulk
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Ultipleat® High Flow, Large Format Filters, Filter Grade 2 µm, Resinbondedglassfiber, Length 20 Inches, Nitrile O-ring Material

Product ID: HFU620GF020H13
Unit of Measure
4/EA
Min Order Qty
4

Ultipleat® High Flow, Large Format Filters, Filter Grade 40 µm, Pleated Polypropylene Depth Structure, Length 20 Inches, Ethylene Propylene O-ring Material

Product ID: HFU620UY400J
Unit of Measure
1/EA
Min Order Qty
1

Ultipleat® High Flow, Large Format Filters, Filter Grade 2 µm, Resinbondedglassfiber, Length 40 Inches, Ethylene Propylene O-ring Material

Product ID: HFU640GF020J
Unit of Measure
4/EA
Min Order Qty
4

Vector™ High Flow Large Format Filters, Removal Rating 10 µm, Polypropylene, Length 20 inches

Product ID: HFV620PP010PH13
Unit of Measure
6/EA
Min Order Qty
6
Cartridge Length
20/508 inch/mm
Filter Grade
10 µm
Hardware Material
White polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
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Vector, Polyester Media Material with 5 µm (micron) Filter Grade

Product ID: HFV620PE005PJ
Unit of Measure
6/EA
Min Order Qty
6
Cartridge Length
20/508 inch/mm
Filter Grade
5 µm
Hardware Material
White polypropylene
Media Material
Polyester
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
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Vector, Polyester Media Material with 1 µm (micron) Filter Grade

Product ID: HFV640PE001AH
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
40/1016 inch/mm
Filter Grade
1 µm
Hardware Material
Acetal Caps
Media Material
Polyester
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
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Vector, Polyester Media Material with 10 µm (micron) Filter Grade

Product ID: HFV640PE010AH13
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
40/1016 inch/mm
Filter Grade
10 µm
Hardware Material
Acetal Caps
Media Material
Polyester
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
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Vector, Polyester Media Material with 50 µm (micron) Filter Grade

Product ID: HFV640PE050AH13
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
40/1016 inch/mm
Filter Grade
50 µm
Hardware Material
Acetal Caps
Media Material
Polyester
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
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Vector, polypropylene Media Material with 50 µm (micron) Filter Grade

Product ID: HFV640PP050PJ
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
40/1016 inch/mm
Filter Grade
50 µm
Hardware Material
White polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
See All Attributes
9,846 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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