Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Red1000 Glass Fiber 12 micron (Beta 1000) Nitrile 36in 91.44cm

Product ID: HC2296FKS36H
Unit of Measure
1/EA
Min Order Qty
6
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2296
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating (μm)
12 µm
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This product is currently not available. Please contact us for more information.

RT250A10S product photo

RT250A10S

Product ID: RT250A10S
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Bulk
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ASSY,HOSE,1 IN XR HOSE, HDPE STRD,OUTER product photo

ASSY,HOSE,1 IN XR HOSE, HDPE STRD,OUTER

Product ID: WH021985
Unit of Measure
1/EA
Min Order Qty
1
WRENCH,6.0IN MF MODULE NUT, 2010 DESIGN product photo

WRENCH,6.0IN MF MODULE NUT, 2010 DESIGN

Product ID: WH060418
Unit of Measure
1/EA
Min Order Qty
1
NUT,MODULE,END CAP,2010 product photo

NUT,MODULE,END CAP,2010

Product ID: WH060417
Unit of Measure
1/EA
Min Order Qty
1
WRENCH,TORQUE,MODULE,30-150FT LB product photo

WRENCH,TORQUE,MODULE,30-150FT LB

Product ID: WH061734
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

CTRG PROFILE NYLON 150

Product ID: WK13A280LBH
Unit of Measure
320/EA
Min Order Qty
320

CTRG PROFILE HARD NYLON

Product ID: WK20B05HNB
Unit of Measure
1/EA
Min Order Qty
1

WK16B19HGB

Product ID: WK16B19HGB
Unit of Measure
1/EA
Min Order Qty
1
ctrg profile hard nylon 100 40" product photo

ctrg profile hard nylon 100 40

Product ID: WK40B05HLB
Unit of Measure
1/EA
Min Order Qty
1

CTRG PROFILE HARD NYLON

Product ID: WK16B19HKB
Unit of Measure
1/EA
Min Order Qty
1

RGN N100 35" SPECIAL LENGTH

Product ID: WR35A720J0
Unit of Measure
12/EA
Min Order Qty
12

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)

Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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