Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Food & Beverage

Nexis® T Series Filter Cartridges, NXT2030UM7WS480 product photo

Nexis® T Series Filter Cartridges, Polypropylene, 20 µm, 30 in., Silicone Elastomer, M7

Product ID: NXT2030UM7WS480
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
20 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Silicone Elastomer
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PAREQII Filter Cartridge, AB1PAREQII7WH4

Product ID: AB1PAREQII7WH4
Unit of Measure
1/EA
Min Order Qty
1
Membrane Material
Polyethersulfone (PES)
Effective Filtration Area (Metric m²)
0.75 m²
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
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Supor® Beverage Filter Cartridges, AB1SBB7WH4

Product ID: AB1SBB7WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.45 µm
Membrane Material
Polyethersulfone (PES)
Industry-Specific Certification
W480 Food Contact
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
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Ultipor® N66 Filter Cartridges, AB2NB7WH4

Product ID: AB2NB7WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.45 µm
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Material
Nylon
Maximum Differential Pressure
5.4 bard @ < 50° C (122◦ F)
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Supor® Beverage Filter Cartridges, AB3SBK7WH4

Product ID: AB3SBK7WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.65 µm
Membrane Material
PES
Industry-Specific Certification
W480 Food Contact
Effective Filtration Area (Metric m²)
2.25 m²
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
30 in
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Supor® Beverage Filter Cartridges, 40in, Silicone Elastomer

Product ID: AB4SBB7WH4
Unit of Measure
1/EA
Min Order Qty
1
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
Silicone Elastomer
Gasket O-Ring Code
H4
Maximum Differential Pressure
5.5 bard (79.8 psid) (forward pressure)
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SUPRApak™ L-Series Hook Spanner DN25-100 Tool

Product ID: ACS1037AA
Unit of Measure
1/EA
Min Order Qty
1

Seitz® FB Series Depth Filter Sheets, AKS FB 600x612 o. SB

Product ID: B04994
Unit of Measure
50/EA
Min Order Qty
50
Filter Media
Activated Carbon and Cellulose Fibers
Hot Water Sanitization
90 °C
Size (Imperial)
23.6” x 24.1”
Size (Metric)
600 mm x 612 mm
Steam Sterilization
125 °C
Food Contact Compliant
Yes
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Seitz® FB Series Depth Filter Sheets, AKS FB 600x612 m. SB

Product ID: B04999
Unit of Measure
50/EA
Min Order Qty
50
Filter Media
Activated Carbon and Cellulose Fibers
Hot Water Sanitization
90 °C
Size (Imperial)
23.6” x 24.1”
Size (Metric)
600 mm x 612 mm
Steam Sterilization
125 °C
Food Contact Compliant
Yes
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Seitz® FB Series Depth Filter Sheets, AKS FB 400x400 o. SB

Product ID: B05022
Unit of Measure
100/EA
Min Order Qty
100
Filter Media
Activated Carbon and Cellulose Fibers
Hot Water Sanitization
90 °C
Size (Imperial)
15.8” x 15.8”
Size (Metric)
400 mm x 400 mm
Steam Sterilization
125 °C
Food Contact Compliant
Yes
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Seitz® FB Series Depth Filter Sheets, AKS FB 400x400 m. SB

Product ID: B05021
Unit of Measure
100/EA
Min Order Qty
100
Filter Media
Activated Carbon and Cellulose Fibers
Hot Water Sanitization
90 °C
Size (Imperial)
15.8” x 15.8”
Size (Metric)
400 mm x 400 mm
Steam Sterilization
125 °C
Food Contact Compliant
Yes
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Seitz® K Series Depth Filter Sheets, SEITZ-EKS 200x200

Product ID: B08456
Unit of Measure
400/EA
Min Order Qty
400
Filter Media
Kieselguhr, Perlite and Cellulose Fibers
Filter Area (Imperial)
0.42 ft²
Filter Area (Metric)
0.04 m²
Hot Water Sanitization
90 °C
Recommended max.dp
1.5 bar
Size (Imperial)
7.8 x 7.8 in
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410 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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