Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Food & Beverage

Nexis® T Series Filter Cartridges, NXT2030UM7WS480 product photo

Nexis® T Series Filter Cartridges, Polypropylene, 20 µm, 30 in., Silicone Elastomer, M7

Product ID: NXT2030UM7WS480
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
20 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Silicone Elastomer
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Seitz® FB Series Depth Filter Sheets, AKS FB 600x612 o. SB

Product ID: B04994
Unit of Measure
50/EA
Min Order Qty
50
Filter Media
Activated Carbon and Cellulose Fibers
Hot Water Sanitization
90 °C
Size (Imperial)
23.6” x 24.1”
Size (Metric)
600 mm x 612 mm
Steam Sterilization
125 °C
Food Contact Compliant
Yes
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Seitz® FB Series Depth Filter Sheets, AKS FB 400x400 m. SB

Product ID: B05021
Unit of Measure
100/EA
Min Order Qty
100
Filter Media
Activated Carbon and Cellulose Fibers
Hot Water Sanitization
90 °C
Size (Imperial)
15.8” x 15.8”
Size (Metric)
400 mm x 400 mm
Steam Sterilization
125 °C
Food Contact Compliant
Yes
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Seitz® FB Series Depth Filter Sheets, AKS FB 600x612 m. SB

Product ID: B04999
Unit of Measure
50/EA
Min Order Qty
50
Filter Media
Activated Carbon and Cellulose Fibers
Hot Water Sanitization
90 °C
Size (Imperial)
23.6” x 24.1”
Size (Metric)
600 mm x 612 mm
Steam Sterilization
125 °C
Food Contact Compliant
Yes
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Seitz® FB Series Depth Filter Sheets, AKS FB 400x400 o. SB

Product ID: B05022
Unit of Measure
100/EA
Min Order Qty
100
Filter Media
Activated Carbon and Cellulose Fibers
Hot Water Sanitization
90 °C
Size (Imperial)
15.8” x 15.8”
Size (Metric)
400 mm x 400 mm
Steam Sterilization
125 °C
Food Contact Compliant
Yes
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HS 9000 400x400 OL in cartons

Product ID: 1439025
Unit of Measure
1/EA
Min Order Qty
100
Filter Media
Kieselguhr, Perlite and Cellulose Fibers
Filter Area (Imperial)
1.73 ft²
Filter Area (Metric)
0.16 m²
Hot Water Sanitization
90 °C
Recommended max.dp
3 bar
Size (Imperial)
15.8 x 15.8 in
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Seitz® HS 6000 Series Depth Filter Sheets 400 x 400

Product ID: 1436040
Unit of Measure
100/EA
Min Order Qty
100
Filter Media
Kieselguhr, Perlite and Cellulose Fibers
Filter Area (Imperial)
1.73 ft²
Filter Area (Metric)
0.16 m²
Hot Water Sanitization
90 °C
Recommended max.dp
3 bar
Size (Imperial)
15.8 x 15.8 in
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SUPRApak PH 5700 MW

Product ID: 5303055/M
Unit of Measure
1/EA
Min Order Qty
1
Core Drainage Discs
Polypropylene
Diameter (Imperial)
12 in
Diameter (Metric)
285 mm
Filter Media
Kieselguhr, Perlite and Cellulose Fibers
Filtration Area (Imperial)
29.1 ft²
Filtration Area (Metric)
2.7 m²
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SUPRApak PH 7200 MW

Product ID: 5302915/M
Unit of Measure
1/EA
Min Order Qty
1
Core Drainage Discs
Polypropylene
Diameter (Imperial)
12 in
Diameter (Metric)
285 mm
Filter Media
Kieselguhr, Perlite and Cellulose Fibers
Filtration Area (Imperial)
29.1 ft²
Filtration Area (Metric)
2.7 m²
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SUPRApak PH 7200 SW

Product ID: 5302915/S
Unit of Measure
1/EA
Min Order Qty
1
Core Drainage Discs
Polypropylene
Diameter (Imperial)
7.5 in
Diameter (Metric)
183 mm
Filter Media
Kieselguhr, Perlite and Cellulose Fibers
Filtration Area (Imperial)
4.3 ft²
Filtration Area (Metric)
0.4 m²
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SUPRApak PH 5700 SW

Product ID: 5303055/S
Unit of Measure
1/EA
Min Order Qty
1
Core Drainage Discs
Polypropylene
Diameter (Imperial)
7.5 in
Diameter (Metric)
183 mm
Filter Media
Kieselguhr, Perlite and Cellulose Fibers
Filtration Area (Imperial)
4.3 ft²
Filtration Area (Metric)
0.4 m²
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SUPRApak PW 7700 MW

Product ID: 5303104/M
Unit of Measure
1/EA
Min Order Qty
1
Core Drainage Discs
Polypropylene
Diameter (Imperial)
11.2 in
Diameter (Metric)
285 mm
Filter Media
Cellulose
Filtration Area (Imperial)
29.1 ft²
Filtration Area (Metric)
2.7 m²
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401 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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