Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Industries

Food & Beverage

Product Type

Housings, Vessels, and Assemblies

RISER PIPING WSFZ TC 2.0

Product ID: GFB0156
Unit of Measure
1/EA
Min Order Qty
1

WSFZ Standard Accessory Kit

Product ID: GFB0157
Unit of Measure
1/EA
Min Order Qty
1

SUPRApak L Series-SA Filter Systems, 6-High Split Bowl, w/Vent, DN6 Hose Tail

Product ID: SPLSA632TVA
Unit of Measure
1/EA
Min Order Qty
1
Bowl Clearance
1976 mm
Cartridge Style
SUPRApak L
Design Pressure (barg)
Liquids: -1 to 8 barg Gases: -1 to 3.5 barg
Diameter (Imperial)
18 in
Housing Height (Metric)
4113 mm
Nominal Diameter (Metric)
457.2 mm
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SUPRApak Adaptor for SDII 1-High

Product ID: SPMRTF21
Unit of Measure
1/EA
Min Order Qty
1

RETROFIT ADAPTOR SPM 3-HIGH TYPE 2

Product ID: SPMRTF23
Unit of Measure
1/EA
Min Order Qty
1

RETROFIT ADAPTOR SPM 4-HIGH TYPE 2

Product ID: SPMRTF24
Unit of Measure
1/EA
Min Order Qty
1

RETROFIT ADAPTOR SPM 2-HIGH TYPE 2

Product ID: SPMRTF22
Unit of Measure
1/EA
Min Order Qty
1

SUPRApak S series Filter Housings without Base Plate, 1 in, Clamp Coupling (ISO 2852)

Product ID: SPSWA2300
Unit of Measure
1/EA
Min Order Qty
1
Bowl Clearance
260 mm
Cartridge Style
SUPRApak S
Design Pressure (barg)
-1 to 6 bar
Diameter (Imperial)
5.1 in
Housing Height (Metric)
591.6 mm
Nominal Diameter (Metric)
130 mm
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IDL filter housing for one cartridge type 1000 series

Product ID: IDL11GN16J7
Unit of Measure
1/EA
Min Order Qty
1
Bowl Clearance
321 mm
Cartridge Lock
Tie rod & Seal nut
Cartridge Style
1000 series
Design Pressure (barg)
-1/17,9@-10/40°C -1/13,8@-10/150°C Barg / T°C
Housing Height (Metric)
362 mm
Nominal Diameter (Metric)
122 mm
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IDL13GN16J7

Product ID: IDL13GN16J7
Unit of Measure
1/EA
Min Order Qty
1
Bowl Clearance
822 mm
Cartridge Lock
V-band
Cartridge Style
1001 V-band
Design Pressure (barg)
17.9 @ 40°C
Diameter (Imperial)
4.81 in
Housing Height (Metric)
870 mm
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Stainless steel, 10", 1" NPT, EPR seal for DOE cartridge (without gasket)

Product ID: IDLD1GN16J
Unit of Measure
1/EA
Min Order Qty
1

IDL Filter Housing for One DOE 30 in. Cartridge DOE/RF V-band, 30 in, 1" NPT/ 1/4" NPT, Ethylene Propylene

Product ID: IDLD3GN16J
Unit of Measure
1/EA
Min Order Qty
1
Cartridge Lock
V-band
Cartridge Style
DOE/RF V-band
Design Pressure (barg)
17.9 @ 40°C
Housing Height (Metric)
34.25 mm
Volume
4.3 L
31 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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