It appears that your browser has JavaScript disabled.

This Website requires your browser to be JavaScript enabled.

Please enable JavaScript and reload this page.

Currently this quote has no items.

Your cart is currently empty.

Please login to access your account.

Applications
Products
Login/Register
Request for Quote

Currently this quote has no items.
Cart 0

Your cart is currently empty.

Currency: USD

Select Territory

Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

Product images are a representation of product family for illustration purposes only. Actual products may vary.

Order Products

Filters

77 Results of total products

Sort by :

Currently shopping by | Clear All

Industries

Food & Beverage

Filter Media

Kieselguhr, Perlite and Cellulose Fibers

Seitz® T Series Depth Filter Sheets 1500 400 x 400 for the Coarse Filtration of Natural Extracts product photo

Product ID: 1415041

Product ID
1415041

Unit of Measure
100/EA

Min Order Qty
100

Filter Media

Kieselguhr, Perlite and Cellulose Fibers

Filter Area (Imperial)

1.73 ft²

Filter Area (Metric)

0.16 m²

Hot Water Sanitization

90 °C

See All Attributes

Unit of Measure
100/EA

Min Order Qty
100

Filter Media

Kieselguhr, Perlite and Cellulose Fibers

Filter Area (Imperial)

1.73 ft²

Filter Area (Metric)

0.16 m²

Hot Water Sanitization

90 °C

See All Attributes

Seitz® HS Series Depth Filter sheet, HS 400 600x612 product photo

Seitz® HS Series Depth Filter sheet, HS 400 600x612

Product ID: 1430458

Product ID
1430458

Unit of Measure
50/EA

Min Order Qty
50

Filter Media

Kieselguhr, Perlite and Cellulose Fibers

Filter Area (Imperial)

3.95 ft²

Filter Area (Metric)

0.37 m²

Hot Water Sanitization

85 °C

See All Attributes

Unit of Measure
50/EA

Min Order Qty
50

Filter Media

Kieselguhr, Perlite and Cellulose Fibers

Filter Area (Imperial)

3.95 ft²

Filter Area (Metric)

0.37 m²

Hot Water Sanitization

85 °C

See All Attributes

Seitz® HS Series Depth Filter sheet, HS 400 400x400 product photo

Seitz® HS Series Depth Filter sheet, HS 400 400x400

Product ID: 1430457

Product ID
1430457

Unit of Measure
100/EA

Min Order Qty
100

Filter Media

Kieselguhr, Perlite and Cellulose Fibers

Filter Area (Imperial)

1.72 ft²

Filter Area (Metric)

0.16 m²

Hot Water Sanitization

85 °C

See All Attributes

Unit of Measure
100/EA

Min Order Qty
100

Filter Media

Kieselguhr, Perlite and Cellulose Fibers

Filter Area (Imperial)

1.72 ft²

Filter Area (Metric)

0.16 m²

Hot Water Sanitization

85 °C

See All Attributes

Seitz® HS Series Depth Filter Sheets, HS 1000 400x400 product photo

Seitz® HS Series Depth Filter Sheets, HS 1000 400x400

Product ID: 1431061

Product ID
1431061

Unit of Measure
100/EA

Min Order Qty
100

Filter Media

Kieselguhr, Perlite and Cellulose Fibers

Filter Area (Imperial)

1.73 ft²

Filter Area (Metric)

0.16 m²

Hot Water Sanitization

90 °C

See All Attributes

Unit of Measure
100/EA

Min Order Qty
100

Filter Media

Kieselguhr, Perlite and Cellulose Fibers

Filter Area (Imperial)

1.73 ft²

Filter Area (Metric)

0.16 m²

Hot Water Sanitization

90 °C

See All Attributes

Seitz® HS Series Depth Filter sheet, HS 2000 400x400 product photo

Seitz® HS Series Depth Filter sheet, HS 2000 400x400

Product ID: 1432057

Product ID
1432057

Unit of Measure
100/EA

Min Order Qty
100

Filter Media

Kieselguhr, Perlite and Cellulose Fibers

Filter Area (Imperial)

1.72 ft²

Filter Area (Metric)

0.16 m²

Hot Water Sanitization

85 °C

See All Attributes

Unit of Measure
100/EA

Min Order Qty
100

Filter Media

Kieselguhr, Perlite and Cellulose Fibers

Filter Area (Imperial)

1.72 ft²

Filter Area (Metric)

0.16 m²

Hot Water Sanitization

85 °C

See All Attributes

Seitz® HS Series Depth Filter sheet, HS 2000 600x612 product photo

Seitz® HS Series Depth Filter sheet, HS 2000 600x612

Product ID: 1432058

Product ID
1432058

Unit of Measure
50/EA

Min Order Qty
50

Filter Media

Kieselguhr, Perlite and Cellulose Fibers

Filter Area (Imperial)

3.95 ft²

Filter Area (Metric)

0.37 m²

Hot Water Sanitization

85 °C

See All Attributes

Unit of Measure
50/EA

Min Order Qty
50

Filter Media

Kieselguhr, Perlite and Cellulose Fibers

Filter Area (Imperial)

3.95 ft²

Filter Area (Metric)

0.37 m²

Hot Water Sanitization

85 °C

See All Attributes

Seitz® HS Series Depth Filter sheet, HS 4000 400x400 product photo

Seitz® HS Series Depth Filter sheet, HS 4000 400x400

Product ID: 1434042

Product ID
1434042

Unit of Measure
100/EA

Min Order Qty
100

Filter Media

Kieselguhr, Perlite and Cellulose Fibers

Filter Area (Imperial)

1.72 ft²

Filter Area (Metric)

0.16 m²

Hot Water Sanitization

85 °C

See All Attributes

Unit of Measure
100/EA

Min Order Qty
100

Filter Media

Kieselguhr, Perlite and Cellulose Fibers

Filter Area (Imperial)

1.72 ft²

Filter Area (Metric)

0.16 m²

Hot Water Sanitization

85 °C

See All Attributes

Seitz® HS 6000 Series Depth Filter Sheets 400 x 400 product photo

Seitz® HS 6000 Series Depth Filter Sheets 400 x 400

Product ID: 1436040

Product ID
1436040

Unit of Measure
100/EA

Min Order Qty
100

Filter Media

Kieselguhr, Perlite and Cellulose Fibers

Filter Area (Imperial)

1.73 ft²

Filter Area (Metric)

0.16 m²

Hot Water Sanitization

90 °C

See All Attributes

Unit of Measure
100/EA

Min Order Qty
100

Filter Media

Kieselguhr, Perlite and Cellulose Fibers

Filter Area (Imperial)

1.73 ft²

Filter Area (Metric)

0.16 m²

Hot Water Sanitization

90 °C

See All Attributes

Seitz® HS 9000 Series Depth Filter Sheets 400 x 400 OL in Cartons for the Coarse Filtration of Enzymes product photo

HS 9000 400x400 OL in cartons

Product ID: 1439025

Product ID
1439025

Unit of Measure
1/EA

Min Order Qty
100

Filter Media

Kieselguhr, Perlite and Cellulose Fibers

Filter Area (Imperial)

1.73 ft²

Filter Area (Metric)

0.16 m²

Hot Water Sanitization

90 °C

See All Attributes

Unit of Measure
1/EA

Min Order Qty
100

Filter Media

Kieselguhr, Perlite and Cellulose Fibers

Filter Area (Imperial)

1.73 ft²

Filter Area (Metric)

0.16 m²

Hot Water Sanitization

90 °C

See All Attributes

Discontinued

Seitz® K Series Depth Filter Sheets, for Fine Filtration,
SEITZ-EK 1 933x933 4L54 product photo

Discontinued

Seitz® K Series Depth Filter Sheets, for Fine Filtration, SEITZ-EK 1 933x933 4L54

Product ID: 5300515

Product ID
5300515

Unit of Measure
25/EA

Min Order Qty
25

Filter Media

Kieselguhr, Perlite and Cellulose Fibers

Filter Area (Imperial)

9.35 ft²

Filter Area (Metric)

0.87 m²

Hot Water Sanitization

90 °C

See All Attributes

Unit of Measure
25/EA

Min Order Qty
25

Filter Media

Kieselguhr, Perlite and Cellulose Fibers

Filter Area (Imperial)

9.35 ft²

Filter Area (Metric)

0.87 m²

Hot Water Sanitization

90 °C

See All Attributes

SUPRApak PW 5900 LW product photo

SUPRApak PW 5900 LW

Product ID: 5302742

Product ID
5302742

Unit of Measure
1/EA

Min Order Qty
1

Diameter (Imperial)

16 in

Diameter (Metric)

410 mm

Filter Media

Kieselguhr, Perlite and Cellulose Fibers

Filtration Area (Imperial)

86.1 ft²

See All Attributes

Unit of Measure
1/EA

Min Order Qty
1

Diameter (Imperial)

16 in

Diameter (Metric)

410 mm

Filter Media

Kieselguhr, Perlite and Cellulose Fibers

Filtration Area (Imperial)

86.1 ft²

See All Attributes

SUPRApak PW 5900 SW product photo

SUPRApak PW 5900 SW

Product ID: 5302742/S

Product ID
5302742/S

Unit of Measure
1/EA

Min Order Qty
1

Diameter (Imperial)

7.5 in

Diameter (Metric)

183 mm

Filter Media

Kieselguhr, Perlite and Cellulose Fibers

Filtration Area (Imperial)

4.3 ft²

See All Attributes

Unit of Measure
1/EA

Min Order Qty
1

Diameter (Imperial)

7.5 in

Diameter (Metric)

183 mm

Filter Media

Kieselguhr, Perlite and Cellulose Fibers

Filtration Area (Imperial)

4.3 ft²

See All Attributes

77 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

Additional benefits include:

High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights:

Higher performance
For fine particle removal
Includes multi-zone pore construction
Longer service life

Applications/Use

Microelectronics:

Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

Materials	Medium: Polypropylene Core, cage, and endcaps: polypropylene O-ring options: ethylene propylene (EPR)
Removal ratings	100 nm
Configurations	Nominal length: 102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in Diameter: 63 mm / 2.5 in O-ring size / end caps: Code 19 (222 double O-ring flat end)
Operating conditions	Maximum operating temperature: 82°C / 180°F Maximum differential pressure: 0.41 MPa @ 30°C / 60 psid @ 85°F 0.34 MPa @ 50°C / 50 psid @ 120°F 0.2 MPa @ 70°C / 30 psid @ 160°F 0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

Profile® Nano Filters for CMP Applications

Select Language :

English