Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

Order Products

Industries

Food & Beverage

Filter Media

Polypropylene

Poly-Fine® II Filter Cartridge, PFT02510UEW480 product photo

Poly-Fine® II Filter Cartridge, PFT02510UEW480

Product ID: PFT02510UEW480
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.25 µm
Poly-Fine® II Filter Cartridge, PFT02510USM8W480 product photo

Poly-Fine® II Filter Cartridge, PFT02510USM8W480

Product ID: PFT02510USM8W480
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.25 µm
Poly-Fine® II Filter Cartridge, PFT02510USM7W480 product photo

Poly-Fine® II Filter Cartridge, PFT02510USM7W480

Product ID: PFT02510USM7W480
Unit of Measure
12/EA
Min Order Qty
12
Micron
0.25 µm
Poly-Fine® II Filter Cartridge, PFT02520UEW480 product photo

Poly-Fine® II Filter Cartridge, PFT02520UEW480

Product ID: PFT02520UEW480
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.25 µm
Poly-Fine® II Filter Cartridge, PFT02530UESIW480 product photo

Poly-Fine® II Filter Cartridge, PFT02530UESIW480

Product ID: PFT02530UESIW480
Unit of Measure
12/EA
Min Order Qty
12
Micron
0.25 µm
Poly-Fine® II Filter Cartridge, PFT02530USM7W480 product photo

Poly-Fine® II Filter Cartridge, PFT02530USM7W480

Product ID: PFT02530USM7W480
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.25 µm
Poly-Fine® II Filter Cartridge, PFT02540USM7W480 product photo

Poly-Fine® II Filter Cartridge, PFT02540USM7W480

Product ID: PFT02540USM7W480
Unit of Measure
12/EA
Min Order Qty
12
Micron
0.25 µm
Poly-Fine® II Filter Cartridge, PFT04510USM3W480 product photo

Poly-Fine® II Filter Cartridge, PFT04510USM3W480

Product ID: PFT04510USM3W480
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.45 µm
Poly-Fine® II Filter Cartridge, PFT04510USM7W480 product photo

Poly-Fine® II Filter Cartridge, PFT04510USM7W480

Product ID: PFT04510USM7W480
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.45 µm
Poly-Fine® II Filter Cartridge, PFT04520UEW480 product photo

Poly-Fine® II Filter Cartridge, PFT04520UEW480

Product ID: PFT04520UEW480
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.45 µm
Poly-Fine® II Filter Cartridge, PFT04530UESIW480 product photo

Poly-Fine® II Filter Cartridge, PFT04530UESIW480

Product ID: PFT04530UESIW480
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.45 µm
PFT 0.45-40US-M8W 480 product photo

PFT 0.45-40US-M8W 480

Product ID: PFT04540USM8W480
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.45 µm

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)

Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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