Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Red1000 Glass Fiber 12 micron (Beta 1000) Nitrile 36in 91.44cm

Product ID: HC2296FKS36H
Unit of Measure
1/EA
Min Order Qty
6
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2296
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating (μm)
12 µm
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Ultipor III Glass Fiber 5 micron (Beta 1000) Nitrile 8in 20.32cm length

Product ID: HC9601FDP8H#28
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC9601
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
5 µm
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PCCMV2-MGR product photo

PCCM ST Stell Grid Reinforced

Product ID: PCCMV2-MGR
Unit of Measure
1/EA
Min Order Qty
1
FILTER CAPSULE product photo

FILTER CAPSULE

Product ID: PCF1Y100N04
Unit of Measure
1/EA
Min Order Qty
1
PCM500WUC MONITOR CLEANLINESS product photo

PCM500WUC MONITOR CLEANLINESS

Product ID: PCM500WUC
Unit of Measure
1/EA
Min Order Qty
1
HOUSING PCY2RFG16HY product photo

HOUSING PCY2RFG16HY

Product ID: PCY2RFG16HY
Unit of Measure
1/EA
Min Order Qty
1

PDF .25-PFT 0.45-10U

Product ID: PDF25PFT04510U
Unit of Measure
1/EA
Min Order Qty
1

ASSEMBLY, FLOAT

Product ID: PE00440500
Unit of Measure
1/EA
Min Order Qty
1

Vector™ Large Format Filters, Removal Rating 100 μm, Polyester, Size 2 cartridge

Product ID: PEV1002UNF
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 2 cartridge
Filter Grade
100 µm
Hardware Material
Polypropylene
Media Material
Polyester
Outside Diameter (Imperial)
6.25 in
Outside Diameter (Metric)
158.8 mm
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Vector™ Large Format Filters, Removal Rating 100 μm, Polyester, Size 2 cartridge, Nitrile

Product ID: PEV1002UNPFA
Unit of Measure
1/EA
Min Order Qty
1
Cartridge Length
Size 2 cartridge
Filter Grade
100 µm
Hardware Material
Polypropylene
Media Material
Polyester
Outside Diameter (Imperial)
6.25 in
Outside Diameter (Metric)
158.8 mm
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Discontinued

This part is no longer available. Please contact us for more information.

Vector™ Large Format Filters, Removal Rating 10 μm, Polyester, Size 2 cartridge, FluorocarbonElastomer, Plastic self-adjusting flange

Product ID: PEV102UVPFA
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 2 cartridge
Filter Grade
10 µm
Hardware Material
Polypropylene
Media Material
Polyester
Outside Diameter (Imperial)
6.25 in
Outside Diameter (Metric)
158.8 mm
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Vector™ Large Format Filters, Removal Rating 100 μm, Polyester, Size 2 cartridge, Nitrile, Plastic self-adjusting flange

Product ID: PEV1002UNPFF
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 2 cartridge
Filter Grade
100 µm
Hardware Material
Polypropylene
Media Material
Polyester
Outside Diameter (Imperial)
6.25 in
Outside Diameter (Metric)
158.8 mm
See All Attributes
7,895 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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