Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Industries

Industrial Manufacturing

Cartridge Length (Imperial)

30 in

Cartridge Length (Metric)

762 mm

DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 30 Inches, 304 stainless steel, with Extended Core

Product ID: C005AW30ACEC1A
Unit of Measure
10/EA
Min Order Qty
10
Removal Rating
5 µm
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
Cartridge Outer Diameter (OD) (Metric)
6.4 cm
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DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 30 Inches, 304 stainless steel, with Extended Core product photo

DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 30 Inches, 304 stainless steel, with Extended Core

Product ID: C010AW30AEC1A
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
See All Attributes
DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Bleached cotton, Length 30 Inches, 316 stainless steel, Bulk packaging product photo

DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Bleached cotton, Length 30 Inches, 316 stainless steel, Bulk packaging

Product ID: C010AW30S
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
See All Attributes
DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 30 Inches, Polypropylene, with Extended Core product photo

DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 30 Inches, Polypropylene, with Extended Core

Product ID: C010AW30UEC1U
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
See All Attributes
DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 30 Inches, Electrolytic tin plated steel, Bulk packaging product photo

DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 30 Inches, Electrolytic tin plated steel, Bulk packaging

Product ID: C010AW30T
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Bulk
See All Attributes

DFT Classic®, Filter Cartridges, Removal Rating 75 μm, Length 30 Inches, Polypropylene

Product ID: C075AW30U
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
75 µm
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
Cartridge Outer Diameter (OD) (Metric)
6.4 cm
See All Attributes
DFT Classic®, Filter Cartridges, Removal Rating 100 μm, Length 30 Inches, 304 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 100 μm, Length 30 Inches, 304 stainless steel

Product ID: C100AW30A
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
See All Attributes
Poly-Fine® II, Filter Cartridges, Removal Rating 0.2 μm, Highly Asymetric Polysulfone, Length 30 Inches, EPDM, SOE fin end external 222 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.2 μm, Highly Asymetric Polysulfone, Length 30 Inches, EPDM, SOE fin end external 222 O-rings

Product ID: PFT0230UEM8
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.2 µm

Poly-Fine® II, Filter Cartridges, Removal Rating 0.2 μm, Highly Asymetric Polysulfone, Length 30 Inches, silicone, SOE fin end external 222 O-rings

Product ID: PFT0230USM8
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Membrane Material
Highly Asymetric Polysulfone
Industry-Specific Certification
General Use
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
See All Attributes
Poly-Fine® II, Filter Cartridges, Removal Rating 0.2 μm, Highly Asymetric Polysulfone, Length 30 Inches, silicone, SOE fin end external 226 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.2 μm, Highly Asymetric Polysulfone, Length 30 Inches, silicone, SOE fin end external 226 O-rings

Product ID: PFT0230USM7
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.2 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 0.2 μm, Highly Asymetric Polysulfone, Length 30 Inches, EPDM, SOE fin end external 226 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.2 μm, Highly Asymetric Polysulfone, Length 30 Inches, EPDM, SOE fin end external 226 O-rings

Product ID: PFT0230UEM7
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.25 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 0.2 μm, Highly Asymetric Polysulfone, Length 30 Inches, Nitrile, DOE industrial product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.2 μm, Highly Asymetric Polysulfone, Length 30 Inches, Nitrile, DOE industrial

Product ID: PFT0230UN
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.2 µm
405 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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