Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

Order Products

Industries

Industrial Manufacturing

Cartridge Length (Imperial)

60 in

Product ID: HFNX660Y150H
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
60/1524 inch/mm
Filter Grade
15 µm
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152.4 mm
See All Attributes
Product ID: HFNX660Y100H
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
60/1524 inch/mm
Filter Grade
10 µm
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152.4 mm
See All Attributes
Product ID: HFNX660Y1000J
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
60/1524 inch/mm
Filter Grade
100 µm
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152.4 mm
See All Attributes
Product ID: HFNX660Y150J
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
60/1524 inch/mm
Filter Grade
15 µm
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152.4 mm
See All Attributes
Product ID: HFNX660Y200J191
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
60/1524 inch/mm
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152.4 mm
Cartridge Length (Imperial)
60 in
See All Attributes
Product ID: HFV660PE050AH13
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
60/1524 inch/mm
Filter Grade
50 µm
Hardware Material
Acetal Caps
Media Material
Polyester
See All Attributes
Product ID: PFTM1060UHFH1
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
60/1524 inches/mm
Filter Grade
10 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
See All Attributes
Product ID: PFTM1060UHFH13
Unit of Measure
1/EA
Min Order Qty
1
Cartridge Length
60/1524 inches/mm
Filter Grade
10 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
See All Attributes
Product ID: PFTM160UHFH13
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
60/1524 inches/mm
Filter Grade
1 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
See All Attributes
Product ID: PFTM160UHFH
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
60/1524 inches/mm
Filter Grade
1 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
See All Attributes
Product ID: PFTM2060UHFJ
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
60/1524 inches/mm
Filter Grade
20 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
See All Attributes
Product ID: PFTM2060UHFH
Unit of Measure
1/EA
Min Order Qty
1
Cartridge Length
60/1524 inches/mm
Filter Grade
20 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
See All Attributes
20 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

    Select Language :
    English