Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

Order Products

Industries

Microelectronics

Gasket / O-Ring Material

NA

NXA 0.5-5U product photo

Nexis, NXA, 0.5 μm, 12.7 cm (5 in), DOE industrial (no end caps)

Product ID: NXA055U
Unit of Measure
60/EA
Min Order Qty
60
Micron
0.5 micron
NXA 10-10U product photo

Nexis, NXA, 10 μm, 25.4 cm (10 in), DOE industrial (no end caps)

Product ID: NXA1010U
Unit of Measure
30/EA
Min Order Qty
30
Micron
10 micron
NXA 10-19.75U-H21 product photo

Nexis, NXA, 10 μm, 50.2 cm (19.75 in), DOE, Santoprene gasket seal

Product ID: NXA101975UH21
Unit of Measure
1/EA
Min Order Qty
1
Micron
10 micron
NXA 20-19.75U-H21 product photo

Nexis, NXA, 20 μm, 50.2 cm (19.75 in), DOE, Santoprene gasket seal

Product ID: NXA201975UH21
Unit of Measure
12/EA
Min Order Qty
12
Micron
20 micron
NXA 30-19.75U-H21 product photo

Nexis, NXA, 30 μm, 50.2 cm (19.75 in), DOE, Santoprene gasket seal

Product ID: NXA301975UH21
Unit of Measure
12/EA
Min Order Qty
12
Micron
30 micron
NXA 50-20U product photo

Nexis, NXA, 50 μm, 50.8 cm (20 in), DOE industrial (no end caps)

Product ID: NXA5020U
Unit of Measure
1/EA
Min Order Qty
1
Micron
50 micron
NXT 0.5-20U product photo

Nexis, NXT, 0.5 μm, 50.8 cm (20 in), DOE industrial (no end caps)

Product ID: NXT0520U
Unit of Measure
10/EA
Min Order Qty
10
Micron
0.5 micron

Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 10 inches, DOE Santoprene gasket seal

Product ID: NXT1010UH21
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
NA
See All Attributes
NXT 1-4U product photo

Nexis, NXT, 1 μm, 10.2 cm (4 in), DOE industrial (no end caps)

Product ID: NXT14U
Unit of Measure
1/EA
Min Order Qty
1
Micron
1 micron
NXT 150-20U product photo

Nexis, NXT, 150 μm, 50.8 cm (20 in), DOE industrial (no end caps)

Product ID: NXT15020U
Unit of Measure
10/EA
Min Order Qty
10
Micron
150 micron
NXT 150-9.75U-H21 product photo

Nexis, NXT, 150 μm, 24.8 cm (9.75 in), DOE, Santoprene gasket seal

Product ID: NXT150975UH21
Unit of Measure
1/EA
Min Order Qty
1
Micron
150 micron
NXT 15-20U product photo

Nexis, NXT, 15 μm, 50.8 cm (20 in), DOE industrial (no end caps)

Product ID: NXT1520U
Unit of Measure
10/EA
Min Order Qty
20
Micron
15 micron
23 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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