Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

Order Products

Industries

Oil & Gas

Cartridge Length (Imperial)

9.75 in

Cartridge Length (Metric)

248 mm

DFT Classic®, Filter Cartridges, Removal Rating 3 μm, Length 9.75 Inches, 304 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 3 μm, Length 9.75 Inches, 304 stainless steel

Product ID: C003A975AC
Unit of Measure
30/EA
Min Order Qty
30
Packaging
Bulk
See All Attributes
DFT Classic®, Filter Cartridges, Removal Rating 20 μm, Length 9.75 Inches, Polypropylene product photo

DFT Classic®, Filter Cartridges, Removal Rating 20 μm, Length 9.75 Inches, Polypropylene

Product ID: C020A975U
Unit of Measure
30/EA
Min Order Qty
30
Packaging
Bulk
See All Attributes
DFT Classic®, Filter Cartridges, Removal Rating 25 μm, Length 9.75 Inches, 304 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 25 μm, Length 9.75 Inches, 304 stainless steel

Product ID: C025A975A
Unit of Measure
30/EA
Min Order Qty
30
Packaging
Bulk
See All Attributes
DFT Classic®, Filter Cartridges, Removal Rating 30 μm, Length 9.75 Inches, 304 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 30 μm, Length 9.75 Inches, 304 stainless steel

Product ID: C030A975A
Unit of Measure
30/EA
Min Order Qty
30
Packaging
Bulk
See All Attributes
DFT Classic®, Filter Cartridges, Removal Rating 50 μm, Length 9.75 Inches, 304 stainless steel, Bulk packaging product photo

DFT Classic®, Filter Cartridges, Removal Rating 50 μm, Length 9.75 Inches, 304 stainless steel, Bulk packaging

Product ID: C050A975A
Unit of Measure
30/EA
Min Order Qty
30
Packaging
Bulk
See All Attributes
Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 9.75 Inches, Fluorocarbon Elastomer product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 9.75 Inches, Fluorocarbon Elastomer

Product ID: PFT08975UVM10
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.8 µm
Nexis® A Series Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 9.75 inches product photo

Nexis® A Series Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 9.75 inches

Product ID: NXA05975UH21
Unit of Measure
30/EA
Min Order Qty
30
Micron
0.5 micron
Nexis® A Series Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 9.75 inches product photo

Nexis® A Series Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 9.75 inches

Product ID: NXA5975U
Unit of Measure
24/EA
Min Order Qty
24
Micron
5 micron
DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 9.75 Inches, 316 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 9.75 Inches, 316 stainless steel

Product ID: G005A975S1PK
Unit of Measure
30/EA
Min Order Qty
30
Packaging
Individually wrapped
See All Attributes
DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 9.75 Inches, 316 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 9.75 Inches, 316 stainless steel

Product ID: G010A975S1PK
Unit of Measure
30/EA
Min Order Qty
30
Packaging
Individually wrapped
See All Attributes
DFT Classic®, Filter Cartridges, Removal Rating 25 μm, Length 9.75 Inches, 316 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 25 μm, Length 9.75 Inches, 316 stainless steel

Product ID: G025A975S1PK
Unit of Measure
30/EA
Min Order Qty
30
Packaging
Individually wrapped
See All Attributes
DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 9.75 Inches, Polypropylene product photo

DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 9.75 Inches, Polypropylene

Product ID: U005A975U
Unit of Measure
30/EA
Min Order Qty
30
Packaging
Bulk
See All Attributes

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)

Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

    Select Language :