Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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HGCR-UDX 20-10 400

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Product ID: HGCOLDSG530U1X400
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Discontinued

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HDC® II Filter Cartridges, Removal Rating 4.5 μm, Length 20 inches, 222 Finned end

Product ID: AB2J0458PH1
Unit of Measure
1/EA
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1
Removal Rating
4.5 µm
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Cartridge Outer Diameter (OD) (Imperial)
2.75 in
Cartridge Outer Diameter (OD) (Metric)
7 cm
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Product ID: AB2PYN18JDUP
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WS18 - 1/2" NPT 200mm Probe 10m Cable

Product ID: WS18DSB08L10
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DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 30 Inches, 304 stainless steel, with Extended Core, Bulk packaging product photo

DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 30 Inches, 304 stainless steel, with Extended Core, Bulk packaging

Product ID: U005AW30AEC1A
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10/EA
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Bulk
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DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Premium polypropylene, Length 30 Inches, 304 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Premium polypropylene, Length 30 Inches, 304 stainless steel

Product ID: U005AW30A
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DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Premium polypropylene, Length 19.5 Inches, Polypropylene product photo

DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Premium polypropylene, Length 19.5 Inches, Polypropylene

Product ID: U005KW195U
Unit of Measure
3/EA
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3
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Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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