Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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NC075AW40A

Product ID: NC075AW40A
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DFT Classic®, Filter Cartridges, Removal Rating 30 μm, Length 20 Inches, 316 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 30 μm, Length 20 Inches, 316 stainless steel

Product ID: G030AW20S1PK
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10/EA
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F85360VE-CU product photo

F85360VE-CU

Product ID: F85360VECU
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SW FILTER 100 UM 30" EXT TIN CORE product photo

SW FILTER 100 UM 30" EXT TIN CORE

Product ID: FBC100R30TE
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GF media, SS304 core, 1µm 30", GF core c

Product ID: FFG1R30S
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FNC10R40SE product photo

FNC10R40SE

Product ID: FNC10R40SE
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DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 10 Inches, 316 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 10 Inches, 316 stainless steel

Product ID: G001A10S1PK
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DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 28 Inches product photo

DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 28 Inches

Product ID: G001DW28S1PK
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DFT Classic®, Filter Cartridges, Removal Rating 3 μm, Length 20 Inches, 316 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 3 μm, Length 20 Inches, 316 stainless steel

Product ID: G003AW20S1PK
Unit of Measure
10/EA
Min Order Qty
10
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Individually wrapped
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DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 30 Inches, 316 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 30 Inches, 316 stainless steel

Product ID: G001AW30S1PK
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10/EA
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10
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DFT Classic®, Filter Cartridges, Removal Rating 3 μm, Length 30 Inches, 316 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 3 μm, Length 30 Inches, 316 stainless steel

Product ID: G003AW30S1PK
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Individually wrapped
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DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 30 Inches, 316 stainless steel, with Extended Core, Individually wrapped product photo

DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 30 Inches, 316 stainless steel, with Extended Core, Individually wrapped

Product ID: G005AW30SEC1S1PK
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10/EA
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10
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Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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