Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

Order Products

Industries

Power & Utilities

Product Type

Filter Cartridges

10P30U

Product ID: 10P30U
Unit of Measure
20/EA
Min Order Qty
20

This product is currently not available. Please contact us for more information.

1C30S

Product ID: 1C30S
Unit of Measure
20/EA
Min Order Qty
20

This product is currently not available. Please contact us for more information.

200NC30U

Product ID: 200NC30U
Unit of Measure
20/EA
Min Order Qty
20

20C30A-EA

Product ID: 20C30AEA
Unit of Measure
20/EA
Min Order Qty
20

20U10U

Product ID: 20U10U
Unit of Measure
60/EA
Min Order Qty
60
3L1025W40A product photo

3L1025W40A

Product ID: 3L1025W40A
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Bulk
See All Attributes

5P40U

Product ID: 5P40U
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

HDC® II Filter Cartridges, Removal Rating 4.5 μm, Length 20 inches, 222 Finned end

Product ID: AB2J0458PH1
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
4.5 µm
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Cartridge Outer Diameter (OD) (Imperial)
2.75 in
Cartridge Outer Diameter (OD) (Metric)
7 cm
See All Attributes

AB2PYN18JDUP

Product ID: AB2PYN18JDUP
Unit of Measure
1/EA
Min Order Qty
1
DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 10 Inches, Electrolytic tin plated steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 10 Inches, Electrolytic tin plated steel

Product ID: C001A10T
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Bulk
See All Attributes
DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 30 Inches, Electrolytic tin plated steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 30 Inches, Electrolytic tin plated steel

Product ID: C001AW30T
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Bulk
See All Attributes
DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 30 Inches, 316 stainless steel, with Extended Core product photo

DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 30 Inches, 316 stainless steel, with Extended Core

Product ID: C001AW30SEC1S
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Bulk
See All Attributes
102 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

    Select Language :
    English