Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Power & Utilities

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Filter Cartridges

AB2PYN18JDUP

Product ID: AB2PYN18JDUP
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1/EA
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DFT Classic®, Filter Cartridges, Removal Rating 5 μm, GlassFiber, Length 10 Inches, 316 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 5 μm, GlassFiber, Length 10 Inches, 316 stainless steel

Product ID: F005A10S1PK
Unit of Measure
1/EA
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1
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Individually wrapped
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DFT Classic®, Filter Cartridges, Removal Rating 10 μm, GlassFiber, Length 30 Inches, 316 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 10 μm, GlassFiber, Length 30 Inches, 316 stainless steel

Product ID: F010AW30S1PK
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1/EA
Min Order Qty
1
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Individually wrapped
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DFT Classic®, Filter Cartridges, Removal Rating 10 μm, GlassFiber, Length 20 Inches product photo

DFT Classic®, Filter Cartridges, Removal Rating 10 μm, GlassFiber, Length 20 Inches

Product ID: F010AW20A1PK
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1/EA
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1
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Individually wrapped
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10P30U

Product ID: 10P30U
Unit of Measure
20/EA
Min Order Qty
20

This product is currently not available. Please contact us for more information.

20C30A-EA

Product ID: 20C30AEA
Unit of Measure
20/EA
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20

20U10U

Product ID: 20U10U
Unit of Measure
60/EA
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60
3L1025W40A product photo

3L1025W40A

Product ID: 3L1025W40A
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1/EA
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1
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Bulk
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DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 10 Inches, 316 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 10 Inches, 316 stainless steel

Product ID: G001A10S1PK
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Individually wrapped
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DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 40 Inches, 316 stainless steel, Individually wrapped product photo

DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 40 Inches, 316 stainless steel, Individually wrapped

Product ID: G005AW40S1PK
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Individually wrapped
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DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 30 Inches, 316 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 30 Inches, 316 stainless steel

Product ID: G010AW30S1PK
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Individually wrapped
See All Attributes
DFT Classic®, Filter Cartridges, Removal Rating 30 μm, Length 20 Inches, 316 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 30 μm, Length 20 Inches, 316 stainless steel

Product ID: G030AW20S1PK
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Individually wrapped
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102 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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