Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Product Type

Filter Cartridges

RT250A10S product photo

RT250A10S

Product ID: RT250A10S
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Bulk
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FEATURED

Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 12 μm, GlassFiber, Length 8 Inches

Product ID: HC8700FRS8Z
Unit of Measure
6/EA
Min Order Qty
6
Removal Rating
12 µm
Membrane Material
Glass Fiber

HC8800FKT8H

Product ID: HC8800FKT8H
Unit of Measure
6/EA
Min Order Qty
6

Ultipor® III Filter Element

Product ID: HC8900FKT8Z
Unit of Measure
6/EA
Min Order Qty
6
FEATURED

Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 7 μm, GlassFiber, Length 26 Inches

Product ID: HC8900FRN26Z
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
7 µm
Membrane Material
Glass Fiber
FEATURED

Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 7 μm, GlassFiber, Length 13 Inches

Product ID: HC8900FRN13Z
Unit of Measure
3/EA
Min Order Qty
3
Removal Rating
7 µm
Membrane Material
Glass Fiber
FEATURED

Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 7 μm, GlassFiber, Length 16 Inches

Product ID: HC8900FRN16Z
Unit of Measure
3/EA
Min Order Qty
3
Removal Rating
7 µm
Membrane Material
Glass Fiber
FEATURED

Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 5 μm, GlassFiber, Length 26 Inches

Product ID: HC8900FRP26Z
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
5 µm
Membrane Material
Glass Fiber
FEATURED

Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 5 μm, GlassFiber, Length 13 Inches

Product ID: HC8900FRP13Z
Unit of Measure
3/EA
Min Order Qty
3
Removal Rating
5 µm
Membrane Material
Glass Fiber
FEATURED

Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 12 μm, GlassFiber, Length 13 Inches

Product ID: HC8900FRS13Z
Unit of Measure
3/EA
Min Order Qty
3
Removal Rating
12 µm
Membrane Material
Glass Fiber
FEATURED

Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 12 μm, GlassFiber, Length 26 Inches

Product ID: HC8900FRS26Z
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
12 µm
Membrane Material
Glass Fiber
FEATURED

Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 12 μm, GlassFiber, Length 16 Inches

Product ID: HC8900FRS16Z
Unit of Measure
3/EA
Min Order Qty
3
Removal Rating
12 µm
Membrane Material
Glass Fiber

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)

Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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