Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Product Type

Filter Cartridges

RT250A10S product photo

RT250A10S

Product ID: RT250A10S
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Bulk
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RGN N100 35" SPECIAL LENGTH

Product ID: WR35A720J0
Unit of Measure
12/EA
Min Order Qty
12

Discontinued

This part is no longer available. Please contact us for more information.

Poly-Fine® XLD Filter Cartridges, Removal Rating 1.5 μm, Polypropylene, Length 40 inches, silicone, SOE fin end external 226 O-rings

Product ID: XLD1540USM7
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
1.5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
Silicone
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Dirt Alert™ Filter Elements
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FEATURED

Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 7 μm, GlassFiber, Length 16 inches

Product ID: HC9600FRN16Z
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
7 µm
Membrane Material
Glass Fiber

Supor® Beverage Filter Cartridges, AB1SBB7WH4

Product ID: AB1SBB7WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.45 µm
Membrane Material
Polyethersulfone (PES)
Industry-Specific Certification
W480 Food Contact
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
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Supor® Beverage Filter Cartridges, AB3SBK7WH4

Product ID: AB3SBK7WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.65 µm
Membrane Material
PES
Industry-Specific Certification
W480 Food Contact
Effective Filtration Area (Metric m²)
2.25 m²
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
30 in
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CLR 5-30-DOEE product photo

CLR 5-30-DOEE

Product ID: CLR530DOEE
Unit of Measure
12/EA
Min Order Qty
12

CMC 10 (6161)

Product ID: CMC106161
Unit of Measure
1/EA
Min Order Qty
1

Duo-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Length 20 Inches, silicone, SOE fin end external 226 O-rings

Product ID: DFNT04520USM7
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
0.45 µm
End Configuration
SOE fin end, external 226 O-rings
Change Out Differential Pressure
2.4 bard

Duo-Fine® II, Filter Cartridges, Removal Rating 1 μm, Length 20 Inches, silicone, SOE fin end external 222 O-rings

Product ID: DFNT120USM8
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
1 µm
End Configuration
SOE fin end, external 222 O-rings
Change Out Differential Pressure
2.4 bard

DFNT 1-30UN-M7

Product ID: DFNT130UNM7
Unit of Measure
1/EA
Min Order Qty
1

Discontinued

This part is no longer available. Please contact us for more information.
3,853 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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