Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

Order Products

Product Type

Filter Cartridges

Length

24.8 cm / 9.75 in

Claris, Polypropylene, 10 micron, 9.75 inch product photo

Claris, Polypropylene, 10 micron, 9.75 inch

Product ID: CLR10975
Unit of Measure
1/EA
Min Order Qty
1
Length
24.8 cm / 9.75 in
Micron
10 micron
Claris® Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 9.75 inches product photo

Claris® Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 9.75 inches

Product ID: CLR1975
Unit of Measure
36/EA
Min Order Qty
36
Length
24.8 cm / 9.75 in
Micron
1 micron
Claris® Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 9.75 inches product photo

Claris® Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 9.75 inches

Product ID: CLR30975
Unit of Measure
36/EA
Min Order Qty
36
Length
24.8 cm / 9.75 in
Micron
30 micron
Claris® Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 9.75 inches product photo

Claris® Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 9.75 inches

Product ID: CLR20975
Unit of Measure
36/EA
Min Order Qty
36
Length
24.8 cm / 9.75 in
Micron
20 micron
Claris, Polypropylene, 50 micron, 9.75 inch product photo

Claris, Polypropylene, 50 micron, 9.75 inch

Product ID: CLR50975
Unit of Measure
1/EA
Min Order Qty
1
Length
24.8 cm / 9.75 in
Micron
50 micron
Claris® Filter Cartridges, Removal Rating 75 μm, Polypropylene, Length 9.75 inches product photo

Claris® Filter Cartridges, Removal Rating 75 μm, Polypropylene, Length 9.75 inches

Product ID: CLR75975
Unit of Measure
36/EA
Min Order Qty
36
Length
24.8 cm / 9.75 in
Micron
75 micron
Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 9.75 inches product photo

Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 9.75 inches

Product ID: CLR5975
Unit of Measure
36/EA
Min Order Qty
36
Length
24.8 cm / 9.75 in
Micron
5 micron
7 Items
  • 1

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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