Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Availability

In Stock

Product Type

Filter Cartridges

DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 30 Inches, 316 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 30 Inches, 316 stainless steel

Product ID: G010AW30S1PK
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Individually wrapped
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DFT Classic®, Filter Cartridges, Removal Rating 20 μm, Length 30 Inches, 316 stainless steel, with Extended Core, Individually wrapped product photo

DFT Classic®, Filter Cartridges, Removal Rating 20 μm, Length 30 Inches, 316 stainless steel, with Extended Core, Individually wrapped

Product ID: G020AW30SEC1S1PK
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Individually wrapped
See All Attributes
DFT Classic®, Filter Cartridges, Removal Rating 30 μm, Length 40 Inches, 304 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 30 μm, Length 40 Inches, 304 stainless steel

Product ID: G030AW40A1PK
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Individually wrapped
See All Attributes

GP 10-20A-X4V 246

Product ID: GP1020AX4V246
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

GP 1-4U-X3S 246

Product ID: GP14UX3S246
Unit of Measure
1/EA
Min Order Qty
1

GP 30-10U-X4N 246

Product ID: GP3010UX4N246
Unit of Measure
1/EA
Min Order Qty
1

GP 50-10U-X4N 246

Product ID: GP5010UX4N246
Unit of Measure
1/EA
Min Order Qty
1

GP 3-30A-X4N 246

Product ID: GP330AX4N246
Unit of Measure
1/EA
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1

This product is currently not available. Please contact us for more information.

FEATURED

Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 12 μm, GlassFiber, Length 6 Inches

Product ID: HC2237FHS6Z
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
12 µm
Membrane Material
Glass Fiber
FEATURED

Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 12 μm, GlassFiber, Length 6 Inches

Product ID: HC2246FRS6H50
Unit of Measure
6/EA
Min Order Qty
6
Removal Rating
12 µm
Membrane Material
Glass Fiber
FEATURED

Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 25 μm, GlassFiber, Length 18 Inches

Product ID: HC2296FRT18H50
Unit of Measure
3/EA
Min Order Qty
3
Removal Rating
25 µm
Membrane Material
Glass Fiber
FEATURED

Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 12 μm, GlassFiber, Length 13 inches

Product ID: HC4704FRS13Z
Unit of Measure
6/EA
Min Order Qty
6
Removal Rating
12 µm
Membrane Material
Glass Fiber

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)

Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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