Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Product Type

Filter Sheets

OUTLET PRESSURE GUAGE product photo

OUTLET PRESSURE GUAGE

Product ID: 400105205
Unit of Measure
1/EA
Min Order Qty
1
TOWER VACUUM GAGE product photo

TOWER VACUUM GAGE

Product ID: 400105401
Unit of Measure
1/EA
Min Order Qty
1

Seitz® K Series Depth Filter Sheets, for Fine Filtration, SEITZ-EK 1 933x933 4L54

Product ID: 5300515
Unit of Measure
25/EA
Min Order Qty
25
Filter Media
Kieselguhr, Perlite and Cellulose Fibers
Filter Area (Imperial)
9.35 ft²
Filter Area (Metric)
0.87 m²
Hot Water Sanitization
90 °C
Recommended max.dp
1.5 bar
Size (Imperial)
36.7 x 36.7 in
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Discontinued

This part is no longer available. Please contact us for more information.

PERMAdur® S Support Filter Sheets, PERMAdur S 400x800 ME UF/K

Product ID: 5303293
Unit of Measure
25/EA
Min Order Qty
25
Filter Media
Celluloses, Polyolefin fibers
Filter Area (Imperial)
3.42 ft²
Filter Area (Metric)
0.32 m²
Hot Water Sanitization
85 °C
Size (Imperial)
15.7 x 31.4 in
Size (Metric)
400 x 800 mm
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Seitz® ZD Series Depth Filter Sheets, EK ZD 1003x1014

Product ID: 5303904
Unit of Measure
75/EA
Min Order Qty
75
Filter Media
Cellulose Fibers
Hot Water Sanitization
85 °C
Recommended max.dp
3 bar
Size (Metric)
1003x1014
Food Contact Compliant
Yes

Seitz® D-400 Support Depth Filter Sheets, Seitz D-400 400x800 ME UF/K

Product ID: 692228
Unit of Measure
50/EA
Min Order Qty
50
Filter Media
Cellulose Fibers
Filter Area (Imperial)
3.42 ft²
Filter Area (Metric)
0.32 m²
Size (Imperial)
15.7 x 31.4 in
Size (Metric)
400 x 800 mm
Food Contact Compliant
Yes
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SUPRAdisc SD 300 300X300S516SP product photo

SUPRAdisc SD 300 300X300S516SP

Product ID: 7005919
Unit of Measure
1/EA
Min Order Qty
1

Seitz® HR Series Depth Filter Sheets, HR 2000 600x612 OL in cartons

Product ID: 705113
Unit of Measure
50/EA
Min Order Qty
50
Filter Media
Kieselguhr, Perlite and Cellulose Fibers
Filter Area (Imperial)
3.95 ft²
Filter Area (Metric)
0.37 m²
Hot Water Sanitization
90 °C
Recommended max.dp
3 bar
Size (Imperial)
23.6 x 24.1 in
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T 1500 400x400

Product ID: 1415041
Unit of Measure
100/EA
Min Order Qty
100
Filter Media
Kieselguhr, Perlite and Cellulose Fibers
Filter Area (Imperial)
1.73 ft²
Filter Area (Metric)
0.16 m²
Hot Water Sanitization
90 °C
Recommended max.dp
1 bar
Size (Imperial)
15.8 x 15.8 in
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Seitz® T Series Depth Filter Sheets, T 2600 400x400 in cartons

Product ID: 1426045
Unit of Measure
100/EA
Min Order Qty
100
Filter Media
Cellulose
Filter Area (Imperial)
1.73 ft²
Filter Area (Metric)
0.16 m²
Hot Water Sanitization
90 °C
Size (Imperial)
15.8 x 15.8 in
Size (Metric)
400 x 400 mm
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Seitz® HS Series Depth Filter sheet, HS 400 400x400

Product ID: 1430457
Unit of Measure
100/EA
Min Order Qty
100
Filter Media
Kieselguhr, Perlite and Cellulose Fibers
Filter Area (Imperial)
1.72 ft²
Filter Area (Metric)
0.16 m²
Hot Water Sanitization
85 °C
Recommended max.dp
1.5 bar
Size (Imperial)
15.75 x 15.75 in
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Seitz® HS Series Depth Filter sheet, HS 400 600x612

Product ID: 1430458
Unit of Measure
50/EA
Min Order Qty
50
Filter Media
Kieselguhr, Perlite and Cellulose Fibers
Filter Area (Imperial)
3.95 ft²
Filter Area (Metric)
0.37 m²
Hot Water Sanitization
85 °C
Recommended max.dp
1.5 bar
Size (Imperial)
23.62 x 24.09 in
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46 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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