Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Product Type

Housings, Vessels, and Assemblies

BOWL 10" MEGAPLAST G2 PFA440HP product photo

BOWL 10" MEGAPLAST G2 PFA440HP

Product ID: CC36849D02
Unit of Measure
1/EA
Min Order Qty
1
CCL4001G160H13 product photo

CCL4001G160H13

Product ID: CCL4001G160H13
Unit of Measure
1/EA
Min Order Qty
1

Ultipor, 150psi Simplex Hsg, 1.5in SAE Ports, 8in Length, Nitrile Seals

Product ID: HH2124A24KNSATYS34
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
8 in
Family
Ultipor
Pressure Rating
150 psi
Port Size
1.5 in
Number of Cartridges
1
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Ultipor, 6500psi Non-bypass Duplex Hsg, 1.5in Flange Ports, 13in Length, Nitrile Seals

Product ID: HH4741G24TW1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Metric Flange (6000 #)
Cartridge Length (Imperial)
13 in
Family
Ultipor
Pressure Rating
6500 psi
Port Size
1.5 in
Number of Cartridges
1 per side
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Ultipor, 6500psi Non-bypass Duplex Hsg, 1.5in Flange Ports, 16in Length, Nitrile Seals

Product ID: HH4741G24UW1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Metric Flange (6000 #)
Cartridge Length (Imperial)
16 in
Family
Ultipor
Pressure Rating
6500 psi
Port Size
1.5 in
Number of Cartridges
1 per side
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Ultipor, 250psi Simplex Hsg, 0.75in SAE Ports, Nitrile Seals

Product ID: HH7400A12B1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Family
Ultipor
Pressure Rating
250 psi
Port Size
0.75 in
Number of Cartridges
1
Material of Construction
Cast Iron
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HH7400A16+++B1 ASSEMBLY HEAD

Product ID: HH7400A16B1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Family
Ultipor
Pressure Rating
250 psi
Port Size
1 in
Number of Cartridges
1
Material of Construction
Cast Iron
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Ultipor, 250psi Non-bypass Simplex Hsg, 1in SAE Ports, Nitrile Seals

Product ID: HH7400A16W1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Family
Ultipor
Pressure Rating
250 psi
Port Size
1 in
Number of Cartridges
1
Material of Construction
Cast Iron
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Ultipor, 250psi Simplex Hsg, 1in SAE Ports, Nitrile Seals

Product ID: HH7400A16A1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Family
Ultipor
Pressure Rating
250 psi
Port Size
1 in
Number of Cartridges
1
Material of Construction
Cast Iron
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Ultipor, 250psi Simplex Hsg, 1in BSP Ports, Nitrile Seals

Product ID: HH7400C16B1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Family
Ultipor
Pressure Rating
250 psi
Port Size
1 in
Number of Cartridges
1
Material of Construction
Cast Iron
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Discontinued

This part is no longer available. Please contact us for more information.

Ultipor, 250psi Non-bypass Simplex Hsg, 1in BSP Ports, Nitrile Seals

Product ID: HH7400C16W1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Family
Ultipor
Pressure Rating
250 psi
Port Size
1 in
Number of Cartridges
1
Material of Construction
Cast Iron
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Ultipor, 250psi Simplex Hsg, 1in BSP Ports, Nitrile Seals

Product ID: HH7400C16A1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Family
Ultipor
Pressure Rating
250 psi
Port Size
1 in
Number of Cartridges
1
Material of Construction
Cast Iron
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729 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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