Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Housings, Vessels, and Assemblies

BOWL 10" MEGAPLAST G2 PFA440HP product photo

BOWL 10" MEGAPLAST G2 PFA440HP

Product ID: CC36849D02
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CCL4001G160H13

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SEAL NUT PTM# P1175655 #MCL1001-4D22 product photo

SEAL NUT PTM# P1175655 #MCL1001-4D22

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FMOCOVERASSY316L

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UD330D2408ZG1

Product ID: UD330D2408ZG1
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UH210A1604ZG ASSY HOUSING

Product ID: UH210A1604ZG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
4 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1 in
Number of Cartridges
1
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Athalon, 6000psi Simplex Hsg, 1in SAE Ports, 4in Length, Fluorocarbon Seals

Product ID: UH210A1604ZGH
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
4 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1 in
Number of Cartridges
1
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Athalon, 6000psi Simplex Hsg, 1.25in SAE Ports, 13in Length, Fluorocarbon Seals

Product ID: UH210A2013ZG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
13 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1.25 in
Number of Cartridges
1
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UH210A1608ZG ASSY HOUSING

Product ID: UH210A1608ZG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
8 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1 in
Number of Cartridges
1
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Athalon, 6000psi Simplex Hsg, 1in BSP Ports, 4in Length, Fluorocarbon Seals

Product ID: UH210C1604ZG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
4 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1 in
Number of Cartridges
1
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Athalon, 6000psi Simplex Hsg, 1.25in SAE Ports, 8in Length, Fluorocarbon Seals

Product ID: UH210A2008ZG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
8 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1.25 in
Number of Cartridges
1
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729 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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