Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

Order Products

Product Type

Housings, Vessels, and Assemblies

118210151, Hardened Washer product photo

118210151, Hardened Washer

Product ID: 118210151
Unit of Measure
1/EA
Min Order Qty
1

V-BAND KIT FOR SUPRApak L HOUSINGS

Product ID: 20005766-K
Unit of Measure
1/EA
Min Order Qty
1

Backflush Support Set-for SUPRAdisc II 16" modules, to be used in WSFZ 16" 4 high housings

Product ID: 20041342
Unit of Measure
1/EA
Min Order Qty
1
Diameter (Imperial)
16 in
Diameter (Metric)
410 mm
Food Contact Compliant
Yes
Hot Water Sanitization
85 °C
Steam Sterilization
121 °C
Support Grid
Polypropylene
See All Attributes

RISER PIPING WSFZ TC 2.0

Product ID: GFB0156
Unit of Measure
1/EA
Min Order Qty
1

WSFZ Standard Accessory Kit

Product ID: GFB0157
Unit of Measure
1/EA
Min Order Qty
1
HOUSING PCY1RFGN16H13 product photo

Polypropylene 10", 1" NPT, DOE (RF, crush seal for cartridges without gaskets)

Product ID: PCY1RFGN16H13
Unit of Measure
1/EA
Min Order Qty
1
HOUSING PCY27GN16H product photo

Polypropylene 20", 1" NPT, Code 7

Product ID: PCY27GN16H
Unit of Measure
1/EA
Min Order Qty
1
HOUSING PCY2RFG16HY product photo

HOUSING PCY2RFG16HY

Product ID: PCY2RFG16HY
Unit of Measure
1/EA
Min Order Qty
1
HOUSING PCY2RFGN16H13 product photo

Polypropylene 20", 1" NPT, DOE (RF, crush seal for cartridges without gaskets)

Product ID: PCY2RFGN16H13
Unit of Measure
1/EA
Min Order Qty
1
H4HF6H20F1BH product photo

Stainless steel, 4 Round x 60” elements, Horizontal

Product ID: H4HF6H20F1BH
Unit of Measure
1/EA
Min Order Qty
1

Housing O-Ring Gen 2&3

Product ID: ACS1039EM
Unit of Measure
1/EA
Min Order Qty
1

Suprapak Housing Torque Unit Clamp Nut

Product ID: ACS1044AA
Unit of Measure
1/EA
Min Order Qty
1
729 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

    Select Language :
    English