Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Product Type

Housings, Vessels, and Assemblies

V-BAND KIT FOR SUPRApak L HOUSINGS

Product ID: 20005766-K
Unit of Measure
1/EA
Min Order Qty
1

Backflush Support Set-for SUPRAdisc II 16" modules, to be used in WSFZ 16" 4 high housings

Product ID: 20041342
Unit of Measure
1/EA
Min Order Qty
1
Diameter (Imperial)
16 in
Diameter (Metric)
410 mm
Food Contact Compliant
Yes
Hot Water Sanitization
85 °C
Steam Sterilization
121 °C
Support Grid
Polypropylene
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UH310E24AN13ZC1YP52 ASSEMBLY FILTER product photo

UH310E24AN13ZC1YP52 ASSEMBLY FILTER

Product ID: 8FL51011
Unit of Measure
1/EA
Min Order Qty
1

SUPRApak Housing Torque Unit Vented

Product ID: ACS1040AA
Unit of Measure
1/EA
Min Order Qty
1

SUPRApak Housing Torque Unit Guide Bush

Product ID: ACS1043AA
Unit of Measure
1/EA
Min Order Qty
1

Suprapak Housing Torque Unit Clamp Nut

Product ID: ACS1044AA
Unit of Measure
1/EA
Min Order Qty
1

KIT ACS1050EA DN65 DIN 11851 GASKET

Product ID: ACS1050EA
Unit of Measure
1/EA
Min Order Qty
1

Housing O-Ring Gen 2&3

Product ID: ACS1039EM
Unit of Measure
1/EA
Min Order Qty
1

AFV03DJ04HB-CN

Product ID: AFV03DJ04HBCN
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Flange (150 #)
Cartridge Length (Imperial)
40 in
Family
Athalon
Pressure Rating
217 psi
Port Size
4 in
Number of Cartridges
3 per side
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Athalon, 217psi Duplex Hsg, 6in Flange Ports, 40in Length, Nitrile Seals

Product ID: AFV07DJ06HBCN
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Flange (150 #)
Cartridge Length (Imperial)
40 in
Family
Athalon
Pressure Rating
217 psi
Port Size
6 in
Number of Cartridges
7 per side
See All Attributes

AFV07DJ04HB-CN

Product ID: AFV07DJ04HBCN
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Flange (150 #)
Cartridge Length (Imperial)
40 in
Family
Athalon
Pressure Rating
217 psi
Port Size
4 in
Number of Cartridges
7 per side
See All Attributes
BOWL 10" MEGAPLAST G2 PFA440HP product photo

BOWL 10" MEGAPLAST G2 PFA440HP

Product ID: CC36849D02
Unit of Measure
1/EA
Min Order Qty
1
661 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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