Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Cartridge Length (Imperial)

10 in

Product Type

Housings, Vessels, and Assemblies

Versalon, 1015psi Simplex Hsg, 1.25in SAE Ports, 10in Length, Fluorocarbon Seals

Product ID: HZF410A20CSKG00001
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
10 in
Family
Versalon
Pressure Rating
1015 psi
Port Size
1.25 in
Number of Cartridges
1
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Versalon, 6090psi Simplex Hsg, 1.25in SAE Ports, 10in Length, Fluorocarbon Seals

Product ID: HZG410A20CSKG1X160
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
10 in
Family
Versalon
Pressure Rating
6090 psi
Port Size
1.25 in
Number of Cartridges
1
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Versalon, 6090psi Simplex Hsg, 1.25in BSP Ports, 10in Length, Fluorocarbon Seals

Product ID: HZG410C20CSKGDX160
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
10 in
Family
Versalon
Pressure Rating
6090 psi
Port Size
1.25 in
Number of Cartridges
1
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FBT Sanitary housing for one cartridge filter - 254 mm (10”)

Product ID: FBT011G23H43A
Unit of Measure
1/EA
Min Order Qty
1
Bowl Clearance
300 mm
Cartridge Lock
Bayonet-Lock
Cartridge Style
AB Code 7
Design Pressure (barg)
-1/10 Barg @ -10/150 T°C
Food Contact Compliant
Yes
Housing Height (Metric)
434 mm
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Athalon, 400psi Simplex Hsg, 1.5in Flange Ports, 10in Length, Nitrile Seals

Product ID: UR619CF24KN1S00001
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Metric Flange (300 #)
Cartridge Length (Imperial)
10 in
Family
Athalon
Pressure Rating
400 psi
Port Size
1.5 in
Number of Cartridges
1
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5 Items
  • 1

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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