Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Product Type

Housings, Vessels, and Assemblies

Material of Construction

Aluminum

Ultipor, 3000psi Non-bypass Simplex Hsg, 0.75in BSP Ports, 8in Length, Fluorocarbon Seals

Product ID: HZ9021C12SW1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
8 in
Family
Ultipor
Pressure Rating
3000 psi
Port Size
0.75 in
Number of Cartridges
1
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Athalon, 145psi Simplex Hsg, 1in SAE Ports, 8in Length, Fluorocarbon Seals

Product ID: UT210A1608ZB
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
8 in
Family
Athalon
Pressure Rating
145 psi
Port Size
1 in
Number of Cartridges
1
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Athalon, 600psi Simplex Hsg, 1in SAE Ports, 3in Length, Fluorocarbon Seals

Product ID: UR209HA1603ZA1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
3 in
Family
Athalon
Pressure Rating
600 psi
Port Size
1 in
Number of Cartridges
1
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Athalon, 600psi Non-bypass Simplex Hsg, 1in BSP Ports, 8in Length, Fluorocarbon Seals

Product ID: UR210A1608ZN
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
8 in
Family
Athalon
Pressure Rating
600 psi
Port Size
1 in
Number of Cartridges
1
See All Attributes

Athalon, 600psi Simplex Hsg, 1in SAE Ports, 3in Length, Fluorocarbon Seals

Product ID: UR209HA1603ZG1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
3 in
Family
Athalon
Pressure Rating
600 psi
Port Size
1 in
Number of Cartridges
1
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USRT, 600psi Simplex Hsg, 1.25in SAE Ports, 8in Length, Fluorocarbon Seals

Product ID: UR219CA2008ZA1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
8 in
Family
USRT
Pressure Rating
600 psi
Port Size
1.25 in
Number of Cartridges
1
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Athalon, 600psi Simplex Hsg, 1.25in BSP Ports, 13in Length, Fluorocarbon Seals

Product ID: UR210C2013ZA
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
13 in
Family
Athalon
Pressure Rating
600 psi
Port Size
1.25 in
Number of Cartridges
1
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Athalon, 600psi Simplex Hsg, 1.25in BSP Ports, 8in Length, Fluorocarbon Seals

Product ID: UR210C2008ZG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
8 in
Family
Athalon
Pressure Rating
600 psi
Port Size
1.25 in
Number of Cartridges
1
See All Attributes

Athalon, 600psi Simplex Hsg, 1.25in BSP Ports, 13in Length, Fluorocarbon Seals

Product ID: UR210C2013ZG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
13 in
Family
Athalon
Pressure Rating
600 psi
Port Size
1.25 in
Number of Cartridges
1
See All Attributes

Athalon, 600psi Simplex Hsg, 1.25in SAE Ports, 8in Length, Fluorocarbon Seals

Product ID: UR210A2008ZA
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
8 in
Family
Athalon
Pressure Rating
600 psi
Port Size
1.25 in
Number of Cartridges
1
See All Attributes

Discontinued

This part is no longer available. Please contact us for more information.

USRT, 600psi Simplex Hsg, 1in BSP Ports, 4in Length, Fluorocarbon Seals

Product ID: UR219CC1604ZG9
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
4 in
Family
USRT
Pressure Rating
600 psi
Port Size
1 in
Number of Cartridges
1
See All Attributes

USRT, 600psi Simplex Hsg, 1.25in BSP Ports, 8in Length, Fluorocarbon Seals

Product ID: UR219CC2008ZA1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
8 in
Family
USRT
Pressure Rating
600 psi
Port Size
1.25 in
Number of Cartridges
1
See All Attributes
121 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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