Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Product Type

Large Format Filters

Product ID: PFTM101UVPFA
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 1 bag
Filter Grade
10 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
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Product ID: PFTM104UNF
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
40/1016 inches/mm
Filter Grade
10 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
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Product ID: PFTM12UEPFC
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 2 bag
Filter Grade
1 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
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Product ID: PFTM11UEPFA213
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 1 bag
Filter Grade
1 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
See All Attributes
Product ID: PFTM11UNF
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 1 bag
Filter Grade
1 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
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This part is no longer available. Please contact us for more information.

Product ID: PFTM12UESFA
Unit of Measure
1/EA
Min Order Qty
1
Product ID: PFTM140UHFJU
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
40/1016 inches/mm
Filter Grade
1 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
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This part is no longer available. Please contact us for more information.

Product ID: PFTM2020UHFJ
Unit of Measure
1/EA
Min Order Qty
1
Cartridge Length
20/508 inches/mm
Filter Grade
20 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
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This part is no longer available. Please contact us for more information.

Product ID: PFTM1740V266
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
38/965 inches/mm
Filter Grade
1 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
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Product ID: PFTM160UHFH13
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
60/1524 inches/mm
Filter Grade
1 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
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Product ID: PFTM52UVPFF
Unit of Measure
4/EA
Min Order Qty
4
Product ID: PFTM7080UHFJ
Unit of Measure
4/EA
Min Order Qty
4

This part is no longer available. Please contact us for more information.

17 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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