Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Product Type

Large Format Filters

Marksman™, Large Format Filters, Filter Grade 10 µm, polypropylene, Size 1 bag, Nitrile

Product ID: PFTM101UNF
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 1 bag
Filter Grade
10 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
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Marksman™, Large Format Filters, Filter Grade 10 µm, Polypropylene, Size 1 bag, EPDM, Plastic self-adjusting flange, Pall Marksman Series vessels, Rosedale4, Strainrite, Krystil Klear

Product ID: PFTM101UEPFA
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 1 bag
Filter Grade
10 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
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Marksman™, Large Format Filters, Filter Grade 10 µm, polypropylene, Size 2 bag, EPDM, Plastic self-adjusting flange, FSI BFNP Seri es vessels (side entry), GAF6

Product ID: PFTM102UEPFB194
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 2 bag
Filter Grade
10 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
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Marksman™, Large Format Filters, Filter Grade 10 µm, polypropylene, Size 1 bag, Fluorocarbon elastomer, Plastic self-adjusting flange

Product ID: PFTM101UVPFA
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 1 bag
Filter Grade
10 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
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Marksman™ High Flow, Large Format Filters, Filter Grade 10 µm, polypropylene, Length 20 Inches, Fluorocarbon Elastomer O-ring

Product ID: PFTM1020UHFH
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
20/508 inches/mm
Filter Grade
10 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6.3 in
Outside Diameter (Metric)
160 mm
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Marksman™, Large Format Filters, Filter Grade 10 µm, polypropylene, Size 2 bag, EPDM, Plastic self-adjusting flange, FSI BFNP Seri es vessels (side entry) GAF6

Product ID: PFTM102UEPFB
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 2 bag
Filter Grade
10 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
See All Attributes

Marksman™ High Flow, Large Format Filters, Filter Grade 10 µm, polypropylene, Length 40 Inches, Ethylene Propylene O-ring

Product ID: PFTM1040UHFJ
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
40/1016 inches/mm
Filter Grade
10 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6.3 in
Outside Diameter (Metric)
160 mm
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Marksman™, Large Format Filters, Filter Grade 10 µm, Polypropylene, Size 2 Bag, Nitrile, Plastic self-adjusting flange, FSI BFNP Seri es vessels (side entry) GAF6

Product ID: PFTM102UNPFB
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 2 Bag
Filter Grade
10 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152.4 mm
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Marksman™, Large Format Filters, Filter Grade 10 µm, polypropylene, Size 2 bag, EPDM, Plastic self-adjusting flange, Pall Marksman Series vessels Rosedale4 Strainrite Krystil Klear5

Product ID: PFTM102UEPFA
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 2 bag
Filter Grade
10 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
See All Attributes

Marksman™, Large Format Filters, Filter Grade 10 µm, polypropylene, Size 2 bag, Fluorocarbon elastomer, Plastic self-adjusting flange

Product ID: PFTM102UVPFC
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 2 bag
Filter Grade
10 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
See All Attributes

Marksman™, Large Format Filters, Filter Grade 10 µm, polypropylene, Size 2 bag, Nitrile, Plastic self-adjusting flange, FSI FSPN Series vessels Hayward7 over the top

Product ID: PFTM102UNPFC
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 2 bag
Filter Grade
10 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
See All Attributes

Marksman™ High Flow, Large Format Filters, Filter Grade 10 µm, polypropylene, Length 60 Inches, 10% glass fiber reinforced polypropylene End caps

Product ID: PFTM1060UHFH1
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
60/1524 inches/mm
Filter Grade
10 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6.3 in
Outside Diameter (Metric)
160 mm
See All Attributes
787 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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