Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Product Type

Lube and Hydraulic Elements

Beta Rating

BETA 2000

Nominal OD (Imperial)

6 in

Supralon™ Lube and Hydraulic Elements, Removal Rating 12 μm, GlassFiber, Length 40 Inches

Product ID: A97539
Unit of Measure
6/EA
Min Order Qty
6
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
HC8300
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
12 micron (Beta 2000)
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This product is currently not available. Please contact us for more information.

Supralon™ Lube and Hydraulic Elements, Removal Rating 12 μm, GlassFiber, Length 24 inches

Product ID: C3302135
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 2000
Element Series
HC8300
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
12 micron (Beta 2000)
See All Attributes

Supralon™ Lube and Hydraulic Elements, Removal Rating 25 μm, GlassFiber, Length 20 Inches

Product ID: KITELEMHC833C00001
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 2000
Element Series
HC8334
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
25 micron (Beta 2000)
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ELEMENT UE610AN20H

Product ID: UE610AN20H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
UE610
Family
Athalon
Filter Media
Glass Fiber
Filter Removal Rating (μm)
7 µm
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ELEMENT UE610AN40H

Product ID: UE610AN40H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
UE610
Family
Athalon
Filter Media
Glass Fiber
Filter Removal Rating (μm)
7 µm
See All Attributes

Athalon Glass Fiber 12 micron (Beta 2000) Nitrile 20in 50.8cm

Product ID: UE610AS20H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
UE610
Family
Athalon
Filter Media
Glass Fiber
Filter Removal Rating (μm)
12 µm
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ELEMENT UE610AP40H

Product ID: UE610AP40H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
UE610
Family
Athalon
Filter Media
Glass Fiber
Filter Removal Rating (μm)
5 µm
See All Attributes

ELEMENT UE610AN20Z

Product ID: UE610AN20Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
UE610
Family
Athalon
Filter Media
Glass Fiber
Filter Removal Rating (μm)
7 µm
See All Attributes

Athalon Glass Fiber 5 micron (Beta 2000) Nitrile 20in 50.8cm

Product ID: UE610AP20H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
UE610
Family
Athalon
Filter Media
Glass Fiber
Filter Removal Rating (μm)
5 µm
See All Attributes

Athalon Glass Fiber 7 micron (Beta 2000) Fluorocarbon 40in 101.6cm

Product ID: UE610AN40Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
UE610
Family
Athalon
Filter Media
Glass Fiber
Filter Removal Rating
7 micron (Beta 2000)
See All Attributes

Athalon Glass Fiber 5 micron (Beta 2000) Fluorocarbon 20in 50.8cm

Product ID: UE610AP20Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
UE610
Family
Athalon
Filter Media
Glass Fiber
Filter Removal Rating
5 micron (Beta 2000)
See All Attributes

Athalon Glass Fiber 5 micron (Beta 2000) Ethylene Propylene 20in 50.8cm

Product ID: UE610AP20J
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
UE610
Family
Athalon
Filter Media
Glass Fiber
Filter Removal Rating (μm)
5 µm
See All Attributes

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)

Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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