Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Nominal Length (Imperial)

4 in

Product Type

Lube and Hydraulic Elements

UE210AT04H ELEMENT

Product ID: UE210AT04H
Unit of Measure
12/EA
Min Order Qty
12
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
UE210
Family
Athalon
Filter Media
Glass Fiber
Filter Removal Rating (μm)
25 µm
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Red1000 Glass Fiber 12 micron (Beta 1000) Nitrile 4in 10.16cm (REPLACED BY HC2216FRS4Z)

Product ID: HC2216FKS4H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2216
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
12 micron (Beta 1000)
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This product is currently not available. Please contact us for more information.

Ultipor III Glass Fiber 5 micron (Beta 1000) Fluorocarbon 4in 10.16cm (REPLACED BY HC7400SRP4Z)

Product ID: HC7400SKP4Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC7400
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating
5 micron (Beta 1000)
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Discontinued

This part is no longer available. Please contact us for more information.

Ultipor Glass Fiber 7µm Nitrile Seal 4in 10.16cm length

Product ID: HC9020FKN4HYQ62
Unit of Measure
10/EA
Min Order Qty
10
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC9020
Family
Ultipor
Filter Media
Glass Fiber
Filter Removal Rating (μm)
7 µm
See All Attributes

Ultipor SRT Anti-Static Glass Fiber 5 micron (Beta 1000) Fluorocarbon 4in 10.16cm length

Product ID: HC9020FAP4Z
Unit of Measure
10/EA
Min Order Qty
10
Anti-Static
Yes
Beta Rating
BETA 1000
Element Series
HC9020
Family
Ultipor SRT
Filter Media
Glass Fiber
Filter Removal Rating (μm)
5 µm
See All Attributes

Ultipor III Glass Fiber 12 micron (Beta 1000) Fluorocarbon 4in 10.16cm (REPLACED BY HC9020FRS4Z)

Product ID: HC9020FKS4Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC9020
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
12 µm
See All Attributes

Discontinued

This part is no longer available. Please contact us for more information.

Ultipor III Glass Fiber 5 micron (Beta 1000) Nitrile 4in 10.16cm (REPLACED BY HC9021FHP4HY923)

Product ID: HC9021FDP4HY923
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC9021
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
5 µm
See All Attributes

Discontinued

This part is no longer available. Please contact us for more information.

Ultipor SRT Glass Fiber 12 micron (Beta 1000) Fluorocarbon 4in 10.16cm (REPLACED BY HC9100FRS4Z)

Product ID: HC9100FAS4Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 1000
Element Series
HC9100
Family
Ultipor SRT
Filter Media
Glass Fiber
Filter Removal Rating (μm)
12 µm
See All Attributes

Discontinued

This part is no longer available. Please contact us for more information.

Ultipor SRT Glass Fiber 7 micron (Beta 1000) Nitrile 4in 10.16cm

Product ID: HC9600FAN4H
Unit of Measure
10/EA
Min Order Qty
10
Anti-Static
Yes
Beta Rating
BETA 1000
Element Series
HC9600
Family
Ultipor SRT
Filter Media
Glass Fiber
Filter Removal Rating (μm)
7 µm
See All Attributes

Ultipor® I Cleanable Filter Element

Product ID: HC9600EOS4H
Unit of Measure
12/EA
Min Order Qty
12
Anti-Static
No
Element Series
HC9600
Family
Ultipor III
Filter Media
Wire Mesh
Filter Removal Rating (μm)
100 µm
Nominal Length (Imperial)
4 in
See All Attributes

ELEMENT UE210AS04J

Product ID: UE210AS04J
Unit of Measure
16/EA
Min Order Qty
16
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
UE210
Family
Athalon
Filter Media
Glass Fiber
Filter Removal Rating (μm)
12 µm
See All Attributes

ELEMENT UE210AP04J

Product ID: UE210AP04J
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
UE210
Family
Athalon
Filter Media
Glass Fiber
Filter Removal Rating (μm)
5 µm
See All Attributes
232 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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