Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Product Type

Lube and Hydraulic Elements

Nominal OD (Imperial)

3.5 in

Red1000 Glass Fiber 25 micron (Beta 1000) Fluorocarbon 13in 33.02cm (REPLACED BY HC2237FHT13Z)

Product ID: HC2237FDT13Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2237
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
22 micron, Beta 1000
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This product is currently not available. Please contact us for more information.

Red1000 Glass Fiber 5 micron (Beta 1000) Fluorocarbon 6in 15.24cm (REPLACED BY HC2237FHP6Z)

Product ID: HC2237FDP6Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2237
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
5 micron (Beta 1000)
See All Attributes

Red1000 Glass Fiber 25 micron (Beta 1000) Nitrile 10in 25.4cm length

Product ID: HC2238FKT10H
Unit of Measure
1/EA
Min Order Qty
6
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2238
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating (μm)
25 µm
See All Attributes

Ultipor Glass Fiber 7µm Nitrile Seal 5in 12.7cm length

Product ID: HC9730FKN5H
Unit of Measure
8/EA
Min Order Qty
8
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC9730
Family
Ultipor
Filter Media
Glass Fiber
Filter Removal Rating (μm)
7 µm
See All Attributes

Ultipor Glass Fiber 5µm Nitrile Seal 10in 25.4cm length

Product ID: HC9730FKP10H
Unit of Measure
4/EA
Min Order Qty
4
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC9730
Family
Ultipor
Filter Media
Glass Fiber
Filter Removal Rating (μm)
5 µm
See All Attributes

Ultipor Glass Fiber 5µm Nitrile Seal 27in 68.58cm length

Product ID: HC9735FKP27H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC9735
Family
Ultipor
Filter Media
Glass Fiber
Filter Removal Rating (μm)
5 µm
See All Attributes

Ultipor Glass Fiber 5µm Fluorocarbon Seal 18in 45.72cm length

Product ID: HC9735FKP18Z
Unit of Measure
3/EA
Min Order Qty
3
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC9735
Family
Ultipor
Filter Media
Glass Fiber
Filter Removal Rating (μm)
5 µm
See All Attributes

HC2233EOJ6H

Product ID: HC2233EOJ6H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Element Series
HC2233
Family
Red1000
Filter Media
Wire Mesh
Filter Removal Rating (μm)
22 µm
Nominal Length (Imperial)
6 in
See All Attributes

Red1000 Glass Fiber 7 micron (Beta 1000) Nitrile 6in 15.24cm (REPLACED BY HC2233FRN6Z)

Product ID: HC2233FKN6H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2233
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
7 micron (Beta 1000)
See All Attributes

Red1000 Glass Fiber 5 micron (Beta 1000) Fluorocarbon 6in 15.24cm (REPLACED BY HC2233FRP6Z)

Product ID: HC2233FKP6Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2233
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
5 micron (Beta 1000)
See All Attributes

This product is currently not available. Please contact us for more information.

Red1000 Glass Fiber 5 micron (Beta 1000) Nitrile 13in 33.02cm (REPLACED BY HC2233FRP13Z)

Product ID: HC2233FKP13H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2233
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
5 micron (Beta 1000)
See All Attributes

This product is currently not available. Please contact us for more information.

Red1000 Glass Fiber 5 micron (Beta 1000) Nitrile 10in 25.4cm (REPLACED BY HC2246FRP10H50)

Product ID: HC2246FKP10H50
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2246
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
5 micron (Beta 1000)
See All Attributes

This product is currently not available. Please contact us for more information.

27 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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