Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

Order Products

Product Type

Lube and Hydraulic Elements

Nominal OD (Imperial)

4.5 in

Coralon Glass Fiber 12µm Nitrile Seal 30in 76.2cm length (REPLACED BY HC2286FRS30H50YT)

Product ID: HC2286FCS30H50YT
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2286
Family
Coralon
Filter Media
Glass Fiber
Filter Removal Rating (μm)
12 µm
See All Attributes

Element Coralon HC2286FCP12Z50

Product ID: HC2286FCP12Z50
Unit of Measure
3/EA
Min Order Qty
3
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2286
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating (μm)
5 µm
See All Attributes

Red1000 Wire Mesh 50 micron Nitrile 15in 38.1cm

Product ID: HC2286EOM15H50
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Element Series
HC2286
Family
Red1000
Filter Media
Wire Mesh
Filter Removal Rating
50 micron
Filter Removal Rating (μm)
50 µm
See All Attributes

Red1000 Wire Mesh 50 micron Nitrile 30in 76.2cm

Product ID: HC2286EOM30H50
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Element Series
HC2286
Family
Red1000
Filter Media
Wire Mesh
Filter Removal Rating
50 micron
Filter Removal Rating (μm)
50 µm
See All Attributes

Red1000 Glass Fiber 5 micron (Beta 1000) Fluorocarbon 30in 76.2cm length

Product ID: HC2286FCP30Z82
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2286
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating (μm)
5 µm
See All Attributes

Red1000 Glass Fiber 12 micron (Beta 1000) Nitrile 15in 38.1cm (REPLACED BY HC2286FRS15H50)

Product ID: HC2286FKS15H50
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2286
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
12 micron (Beta 1000)
See All Attributes

This product is currently not available. Please contact us for more information.

Red1000 Wire Mesh 100 micron Nitrile 15in 38.1cm

Product ID: HC2286EOS15H50
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Element Series
HC2286
Family
Red1000
Filter Media
Wire Mesh
Filter Removal Rating
100 micron
Filter Removal Rating (μm)
100 µm
See All Attributes

HC2286EOJ12H50

Product ID: HC2286EOJ12H50
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Element Series
HC2286
Family
Red1000
Filter Media
Wire Mesh
Filter Removal Rating (μm)
22 µm
Nominal Length (Imperial)
12 in
See All Attributes

HC2286EOS30H50, ELEMENT

Product ID: HC2286EOS30H50
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Element Series
HC2286
Family
Red1000
Filter Media
Wire Mesh
Filter Removal Rating
100 micron
Filter Removal Rating (μm)
100 µm
See All Attributes

HC2286EOJ15H50

Product ID: HC2286EOJ15H50
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Element Series
HC2286
Family
Red1000
Filter Media
Wire Mesh
Filter Removal Rating
22 micron
Filter Removal Rating (μm)
22 µm
See All Attributes

Red1000 Glass Fiber 5 micron (Beta 1000) Fluorocarbon 12in 30.48cm length

Product ID: HC2285FCP12Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2285
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating (μm)
5 µm
See All Attributes

Discontinued

This part is no longer available. Please contact us for more information.

Red1000 Glass Fiber 7 micron (Beta 1000) Nitrile 15in 38.1cm

Product ID: HC2285FCN15H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2285
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
7 micron (Beta 1000)
See All Attributes

Discontinued

This part is no longer available. Please contact us for more information.
19 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

    Select Language :
    English