Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Product Use

Air, Gas, and Vent Filtration

SUPRAdisc SD II 150 200X150C440SP product photo

SUPRAdisc SD II 150 200X150C440SP

Product ID: 7007321
Unit of Measure
1/EA
Min Order Qty
1

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Emflon® PFR Membrane in Novasip™ Capsules

Emflon® PFR Membrane in Novasip™ Capsules have lower installation costs than comparable systems. Its steam sterilizing durability provides a long service life and low maintenance costs. Novasip™ filters use polyethermide because of its strong withstanding features against elevated temperature and pressure. Designed with air and vent applications Novasip™ filters can be used in a range of operating conditions.

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Emflon® ll Membrane in Kleenpak™ Capsules

Emflon® II Membrane in Kleenpak™ Capsules serves the user's specific systematic needs. Pall offers options including gama-irradiatable, pre-sterilized and custom-made sets. All versions perform to the same top quality standard. Each unit is fully integrity testable and has the highly retentive Emflon II membrane. These capsule filters provide high air flows of both air and gas.

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SUPRAdisc SD II EK 1 200XEK1S232SP product photo

SUPRAdisc SD II EK 1 200XEK1S232SP

Product ID: 7005243
Unit of Measure
1/STK
Min Order Qty
1

SUPRAdisc SD II 300 200X300S232SP

Product ID: 7005291
Unit of Measure
1/EA
Min Order Qty
1

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SUPRAdisc SD II EK 1 200XEK1C440SP

Product ID: 7007249
Unit of Measure
1/STK
Min Order Qty
1

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SUPRAdisc SD II 700 200X700C440SP

Product ID: 7007263
Unit of Measure
1/EA
Min Order Qty
1

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7007323 product photo

SUPRAdisc SD II 300 200X300C440SP

Product ID: 7007323
Unit of Measure
1/EA
Min Order Qty
1
Emflon® PFA membrane filter cartridge, 0.2 µm bioburden reduction, 5-inch length, double-o-ring (silicone) with bayonet lock and flat end product photo

Emflon® PFA membrane filter cartridge, 0.2 µm bioburden reduction, 5-inch length, double-o-ring (silicone) with bayonet lock and flat end

Product ID: AB05PFA2PVH4
Unit of Measure
1/EA
Min Order Qty
1
Sterilization Option(s)
Suitable for Autoclave or SIP
Filter Cartridge Style
Code 2
Cartridge Length (Metric)
127 mm
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Oenopure™ Filter Cartridges, AB1GB7WH4

Product ID: AB1GB7WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.45 µm
Membrane Material
Hydrophillic Polyethersulfone
Effective Filtration Area (Metric cm²)
0.6 cm²
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
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FEATURED

Emflon® PFRW Filter Cartridge, AB1PFR3WH4

Product ID: AB1PFR3WH4
Unit of Measure
1/EA
Min Order Qty
1

AB1RZ8H4

Product ID: AB1RZ8H4
Unit of Measure
1/EA
Min Order Qty
1
75 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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